144:
1083:
1095:
216:
with the distance between the specimen and the crystal equal to the distance between the crystal and the detector. It is usually operated under vacuum to reduce the absorption of soft radiation (low-energy photons) by the air and thus increase the sensitivity for the detection and quantification of
228:
As the atomic number of the element increases so there are more possible electrons at different energy levels that can be ejected resulting in x-rays with different wavelengths. This creates spectra with multiple lines, one for each energy level. The largest peak in the spectrum is labelled
155:
within an atom or ion, creating a void. This void is filled when an electron from a higher orbital releases energy and drops down to replace the dislodged electron. The energy difference between the two orbitals is characteristic of the
192:
This means that a crystal with a known lattice size will deflect a beam of x-rays from a specific type of sample at a pre-determined angle. The x-ray beam can be measured by placing a detector (usually a
107:) is a non-destructive analysis technique used to obtain elemental information about a range of materials by measuring characteristic x-rays within a small wavelength range. The technique generates a
201:) in the path of the deflected beam and, since each element has a distinctive x-ray wavelength, multiple elements can be determined by having multiple crystals and multiple detectors.
727:
225:). The technique generates a spectrum with peaks corresponding to x-ray lines. This is compared with reference spectra to determine the elemental composition of the sample.
710:
705:
854:
557:
135:
Wavelength-dispersive X-ray spectroscopy is based on known principles of how the characteristic x-rays are generated by a sample and how the x-rays are measured.
844:
447:
111:
in which the peaks correspond to specific x-ray lines and elements can be easily identified. WDS is primarily used in chemical analysis, wavelength dispersive
747:
720:
172:, when an X-ray beam of wavelength "λ" strikes the surface of a crystal at an angle "Θ" and the crystal has atomic lattice planes a distance "d" apart, then
655:
254:
Analysis is generally limited to a very small area of the sample, although modern automated equipment often use grid patterns for larger analysis areas.
715:
675:
799:
665:
612:
245:
Applications include analysis of catalysts, cement, food, metals, mining and mineral samples, petroleum, plastics, semiconductors, and wood.
1054:
782:
767:
693:
88:
804:
637:
490:
440:
792:
787:
685:
660:
627:
864:
849:
829:
567:
1121:
632:
475:
1099:
809:
772:
617:
275:
of another element and hence if the first element is present, the second element cannot be reliably detected (for example
1087:
647:
433:
124:
1126:
834:
752:
173:
1059:
1013:
839:
1049:
762:
698:
572:
531:
326:
952:
157:
957:
777:
194:
411:
143:
962:
521:
151:
X-rays are generated when an electron beam of high enough energy dislodges an electron from an inner
927:
912:
819:
814:
757:
622:
604:
536:
526:
470:
456:
120:
998:
577:
541:
301:
176:
will result in a beam of diffracted x-rays that will be emitted from the crystal at angle "Θ" if
112:
942:
937:
892:
824:
352:
947:
902:
516:
169:
152:
1115:
978:
922:
582:
1029:
353:"An Introduction to Energy-Dispersive and Wavelength-Dispersive X-Ray Microanalysis"
1039:
1003:
897:
887:
562:
511:
116:
261:
of elements as the electron configuration of isotopes of an element are identical.
147:
Electron beam interactions with a sample, X-rays are one of the possible products
983:
917:
907:
212:. The single crystal, the specimen, and the detector are mounted precisely on a
1064:
485:
480:
213:
209:
205:
56:
932:
587:
1034:
500:
284:
276:
264:
It cannot measure the valence state of the element, for example Fe vs Fe.
108:
381:
127:, and high precision experiments for testing atomic and plasma physics.
1044:
988:
670:
258:
183:
425:
1008:
222:
68:
64:
60:
218:
198:
142:
993:
160:
of the atom or ion and can be used to identify the atom or ion.
72:
429:
1022:
971:
880:
873:
740:
684:
646:
603:
596:
550:
499:
463:
84:
79:
52:
48:
Elements in solids, liquids, powders and thin films
44:
36:
26:
204:To improve accuracy the x-ray beams are usually
855:Serial block-face scanning electron microscopy
558:Detectors for transmission electron microscopy
441:
8:
182:nλ = 2d sin Θ, where n is an
21:
877:
600:
448:
434:
426:
412:"Wavelength-dispersive spectroscopy (WDS)"
321:
319:
317:
257:The technique cannot distinguish between
416:Geochemical Instrumentation and Analysis
376:
374:
331:Geochemical Instrumentation and Analysis
97:Wavelength-dispersive X-ray spectroscopy
22:Wavelength-dispersive X-ray spectroscopy
313:
20:
406:
404:
402:
7:
1094:
89:Energy-dispersive X-ray spectroscopy
208:by parallel copper blades called a
382:"EDXRF - XRF - Elemental Analysis"
14:
491:Timeline of microscope technology
1093:
1082:
1081:
850:Precession electron diffraction
386:Applied Rigaku Technologies Inc
63:, Hecus, Malvern Panalytical,
1:
125:scanning electron microscopes
16:Chemical analysis technique
1143:
835:Immune electron microscopy
753:Annular dark-field imaging
568:Everhart–Thornley detector
267:In certain elements, the K
1077:
989:Hitachi High-Technologies
174:constructive interference
1014:Thermo Fisher Scientific
840:Geometric phase analysis
728:Aberration-Corrected TEM
357:Wiley Analytical Science
271:line might overlap the K
217:light elements (between
763:Charge contrast imaging
573:Field electron emission
953:Thomas Eugene Everhart
158:electron configuration
148:
1122:Emission spectroscopy
958:Vernon Ellis Cosslett
778:Dark-field microscopy
195:scintillation counter
146:
963:Vladimir K. Zworykin
613:Correlative light EM
522:Electron diffraction
199:proportional counter
121:electron microprobes
75:, Oxford Instruments
928:Manfred von Ardenne
913:Gerasimos Danilatos
820:Electron tomography
815:Electron holography
758:Cathodoluminescence
537:Secondary electrons
527:Electron scattering
471:Electron microscopy
457:Electron microscopy
418:. 10 November 2016.
359:. 14 September 2020
23:
1127:X-ray spectroscopy
1050:Digital Micrograph
656:Environmental SEM
578:Field emission gun
542:X-ray fluorescence
333:. 10 November 2016
302:X-ray spectroscopy
149:
113:X-ray fluorescence
65:Rigaku Corporation
1109:
1108:
1073:
1072:
943:Nestor J. Zaluzec
938:Maximilian Haider
736:
735:
210:Söller collimator
164:X-ray measurement
94:
93:
1134:
1097:
1096:
1085:
1084:
893:Bodo von Borries
878:
638:Photoemission EM
601:
450:
443:
436:
427:
420:
419:
408:
397:
396:
394:
392:
378:
369:
368:
366:
364:
349:
343:
342:
340:
338:
323:
139:X-ray generation
80:Other techniques
24:
1142:
1141:
1137:
1136:
1135:
1133:
1132:
1131:
1112:
1111:
1110:
1105:
1069:
1018:
967:
948:Ondrej Krivanek
869:
732:
680:
642:
628:Liquid-Phase EM
592:
551:Instrumentation
546:
504:
495:
459:
454:
424:
423:
410:
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236:
232:
166:
141:
133:
31:
17:
12:
11:
5:
1140:
1138:
1130:
1129:
1124:
1114:
1113:
1107:
1106:
1104:
1103:
1091:
1078:
1075:
1074:
1071:
1070:
1068:
1067:
1062:
1057:
1055:Direct methods
1052:
1047:
1042:
1037:
1032:
1026:
1024:
1020:
1019:
1017:
1016:
1011:
1006:
1001:
996:
991:
986:
981:
975:
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968:
966:
965:
960:
955:
950:
945:
940:
935:
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920:
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905:
903:Ernst G. Bauer
900:
895:
890:
884:
882:
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871:
870:
868:
867:
862:
857:
852:
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842:
837:
832:
827:
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797:
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770:
765:
760:
755:
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744:
742:
738:
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734:
733:
731:
730:
725:
724:
723:
713:
708:
703:
702:
701:
690:
688:
682:
681:
679:
678:
673:
668:
663:
658:
652:
650:
644:
643:
641:
640:
635:
630:
625:
620:
615:
609:
607:
598:
594:
593:
591:
590:
585:
580:
575:
570:
565:
560:
554:
552:
548:
547:
545:
544:
539:
534:
529:
524:
519:
517:Bremsstrahlung
514:
508:
506:
497:
496:
494:
493:
488:
483:
478:
473:
467:
465:
461:
460:
455:
453:
452:
445:
438:
430:
422:
421:
398:
370:
344:
312:
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309:
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305:
304:
297:
294:
293:
292:
288:
280:
272:
268:
265:
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255:
250:
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230:
190:
189:
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165:
162:
140:
137:
132:
129:
92:
91:
86:
82:
81:
77:
76:
54:
50:
49:
46:
42:
41:
38:
37:Classification
34:
33:
28:
15:
13:
10:
9:
6:
4:
3:
2:
1139:
1128:
1125:
1123:
1120:
1119:
1117:
1102:
1101:
1092:
1090:
1089:
1080:
1079:
1076:
1066:
1063:
1061:
1058:
1056:
1053:
1051:
1048:
1046:
1043:
1041:
1038:
1036:
1033:
1031:
1028:
1027:
1025:
1021:
1015:
1012:
1010:
1007:
1005:
1002:
1000:
997:
995:
992:
990:
987:
985:
982:
980:
979:Carl Zeiss AG
977:
976:
974:
972:Manufacturers
970:
964:
961:
959:
956:
954:
951:
949:
946:
944:
941:
939:
936:
934:
931:
929:
926:
924:
923:James Hillier
921:
919:
916:
914:
911:
909:
906:
904:
901:
899:
896:
894:
891:
889:
886:
885:
883:
879:
876:
872:
866:
863:
861:
858:
856:
853:
851:
848:
846:
843:
841:
838:
836:
833:
831:
828:
826:
823:
821:
818:
816:
813:
811:
808:
806:
803:
801:
798:
794:
791:
790:
789:
786:
784:
781:
779:
776:
774:
771:
769:
766:
764:
761:
759:
756:
754:
751:
749:
746:
745:
743:
739:
729:
726:
722:
719:
718:
717:
714:
712:
709:
707:
704:
700:
697:
696:
695:
692:
691:
689:
687:
683:
677:
676:Ultrafast SEM
674:
672:
669:
667:
664:
662:
659:
657:
654:
653:
651:
649:
645:
639:
636:
634:
633:Low-energy EM
631:
629:
626:
624:
621:
619:
616:
614:
611:
610:
608:
606:
602:
599:
595:
589:
586:
584:
583:Magnetic lens
581:
579:
576:
574:
571:
569:
566:
564:
561:
559:
556:
555:
553:
549:
543:
540:
538:
535:
533:
532:Kikuchi lines
530:
528:
525:
523:
520:
518:
515:
513:
510:
509:
507:
502:
498:
492:
489:
487:
484:
482:
479:
477:
474:
472:
469:
468:
466:
462:
458:
451:
446:
444:
439:
437:
432:
431:
428:
417:
413:
407:
405:
403:
399:
387:
383:
377:
375:
371:
358:
354:
348:
345:
332:
328:
322:
320:
318:
314:
307:
303:
300:
299:
295:
286:
278:
266:
263:
260:
256:
253:
252:
248:
246:
240:
238:
237:, and so on.
226:
224:
220:
215:
211:
207:
202:
200:
196:
185:
181:
180:
179:
178:
177:
175:
171:
168:According to
163:
161:
159:
154:
145:
138:
136:
130:
128:
126:
122:
118:
114:
110:
106:
102:
98:
90:
87:
83:
78:
74:
70:
66:
62:
58:
55:
53:Manufacturers
51:
47:
43:
39:
35:
29:
25:
19:
1098:
1086:
1040:EM Data Bank
1004:Nion Company
898:Dennis Gabor
888:Albert Crewe
859:
666:Confocal SEM
563:Electron gun
512:Auger effect
415:
391:14 September
389:. Retrieved
385:
363:14 September
361:. Retrieved
356:
347:
337:14 September
335:. Retrieved
330:
244:
241:Applications
233:, the next K
227:
203:
191:
167:
150:
134:
117:spectrometry
104:
100:
96:
95:
40:Spectroscopy
18:
984:FEI Company
918:Harald Rose
908:Ernst Ruska
597:Microscopes
505:with matter
503:interaction
327:"BraggsLaw"
249:Limitations
170:Bragg's law
1116:Categories
1065:Multislice
881:Developers
741:Techniques
486:Microscope
481:Micrograph
308:References
214:goniometer
206:collimated
67:, Xenocs,
61:Bruker AXS
57:Anton Paar
933:Max Knoll
588:Stigmator
283:overlaps
1088:Category
1035:CrysTBox
1023:Software
694:Cryo-TEM
501:Electron
296:See also
259:isotopes
115:(WDXRF)
109:spectrum
45:Analytes
1100:Commons
748:4D STEM
721:4D STEM
699:Cryo-ET
671:SEM-XRF
661:CryoSEM
618:Cryo-EM
476:History
184:integer
153:orbital
85:Related
27:Acronym
1045:EMsoft
1030:CASINO
1009:TESCAN
874:Others
773:cryoEM
464:Basics
223:oxygen
131:Theory
69:CAMECA
999:Leica
845:PINEM
711:HRTEM
706:EFTEM
219:boron
197:or a
1060:IUCr
994:JEOL
865:WBDF
860:WDXS
810:EBIC
805:EELS
800:ECCI
788:EBSD
768:CBED
716:STEM
393:2020
365:2020
339:2020
221:and
101:WDXS
73:JEOL
30:WDXS
830:FEM
825:FIB
793:TKD
783:EDS
686:TEM
648:SEM
623:EMP
105:WDS
103:or
32:WDS
1118::
605:EM
414:.
401:^
384:.
373:^
355:.
329:.
316:^
285:Ti
123:,
119:,
71:,
59:,
449:e
442:t
435:v
395:.
367:.
341:.
291:)
289:β
287:K
281:α
279:K
277:V
273:β
269:α
235:β
231:α
229:K
186:.
99:(
Text is available under the Creative Commons Attribution-ShareAlike License. Additional terms may apply.
