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cannot be scanned and therefore masks are needed to selectively expose your sample to radiation. It is the radiation that causes changes in the sample, which in turn allows scientists and engineers to develop tiny devices such as microprocessors, accelerometers (like in most car safety systems), etc.
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processes is that a microprobe beam can be scanned or directed over any area of the sample. This scanning of the microprobe beam can be imagined to be like using a very fine tipped pencil to draw your design on a paper or in a drawing program. Traditional lithography processes use photons which
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techniques as microscopies with spot sizes in the micro-/nanometre range. These instruments are applied to solve scientific problems in a diverse range of fields, from microelectronics to biomedicine. In addition to the development of new ways to exploit these probes as analytical tools (this
103:(in the case where the primary beam consists of charged electrons) or measurement of an emitted secondary beam of material sputtered from the target (in the case where the primary beam consists of charged ions).
145:. Some of the most advanced nuclear microprobes have beam energies in excess of 2 MeV. This gives the device very high sensitivity to minute concentrations of elements, around 1
253:
Denoyer, Eric.; Van
Grieken, Rene.; Adams, Fred.; Natusch, David F. S. (1982). "Laser microprobe mass spectrometry. 1. Basic principles and performance characteristics".
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analytical techniques, when the instrument is set up to analyse micro samples or micro areas of larger specimens. Such techniques include micro
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114:). An FIB makes a small portion of the material into a plasma; the analysis is done by the same basic techniques as the ones used in
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Applications of
Nuclear Microprobe in the Life Sciences: An Efficient Analytical Technique for the Research in Biology and Medicine
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134:), strong progress has been made in the area of materials modification recently (most of which can be described as PBW,
125:(mega-electronvolt) they are called nuclear microprobes. Nuclear microprobes are extremely powerful tools that utilize
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Hillenkamp, F.; Unsöld, E.; Kaufmann, R.; Nitsche, R. (1975). "A high-sensitivity laser microprobe mass analyzer".
153:. This elemental sensitivity exists because when the beam interacts with the a sample it gives off characteristic
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Van Vaeck, L (1997). "Laser
Microprobe Mass Spectrometry: Principle and Applications in Biology and Medicine".
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Scientists use this beam of charged particles to determine the elemental composition of solid materials (
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to locate the area to be analysed, direct the probe beam and collect the analytical signal.
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that uses ionization by a pulsed laser and subsequent mass analysis of the generated ions.
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composition of the target can be found from the elemental data extracted through emitted
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Another use for microprobes is the production of micro and nano sized devices, as in
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of each element present in the sample. This type of detection of radiation is called
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Electron
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The nuclear microprobe's beam is usually composed of protons and
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When the ion energy is higher, hundreds of keV to a few
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application area of the nuclear microprobes is called
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When the ion energy is in the range of a few tens of
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is used. The term microprobe may also be applied to
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370:Yvan Llabador; Philippe Moretto (1998).
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149:at beam sizes smaller than 1
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174:microelectromechanical systems
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178:nanoelectromechanical systems
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347:Cambridge University Press
290:Cell Biology International
163:Rutherford backscattering
302:10.1006/cbir.1997.0198
444:Measuring instruments
54:infrared spectroscopy
255:Analytical Chemistry
267:10.1021/ac00238a001
216:1975ApPhy...8..341H
136:proton beam writing
38:electron microprobe
224:10.1007/BF00898368
132:nuclear microscopy
50:Raman spectroscopy
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387:978-981-02-2362-5
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56:and micro
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409:CRC Press
310:1065-6995
275:0003-2700
240:135753888
232:0340-3793
22:electrons
97:chemical
85:minerals
52:, micro
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318:9693833
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314:PMID
306:ISSN
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228:ISSN
176:and
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159:PIXE
79:Uses
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