675:
367:
355:
1756:
106:
74:
66:
98:
206:. William (Bill) C. McElroy Jr. worked as an engineering manager, drafting room supervisor, QA/QC, and designer for all three companies, and his designs added 45 original patents to the technology of the time. McElroy also wrote a four-page article for MicroContamination Journal, wet processing training manuals, and equipment manuals for wet processing and cleanrooms.
82:
46:
511:
draw air from outside and pass it through HEPA fan filter units into the cleanroom. The air then leaves through exhaust grills. The advantage of this approach is the lower cost. The disadvantages are comparatively shorter HEPA fan filter life, worse particle counts than a recirculating cleanroom, and
186:
By mid-1963, more than 200 U.S. industrial plants had such specially constructed facilities—then using the terminology “White Rooms,” “Clean Rooms,” or “Dust-Free Rooms”—including the Radio
Corporation of America, McDonnell Aircraft, Hughes Aircraft, Sperry Rand, Sylvania Electric, Western Electric,
155:
Cleanrooms typically come with a cleanliness level quantified by the number of particles per cubic meter at a predetermined molecule measure. The ambient outdoor air in a typical urban area contains 35,000,000 particles for each cubic meter in the size range 0.5 μm and bigger, equivalent to an ISO 9
428:, including 99.99 percent of airborne microbial and fungal contaminants. UV light has previously been used to clean surface contaminants in sterile environments such as hospital operating rooms. Their use in other cleanrooms may increase as equipment becomes more affordable. Potential advantages of
396:
are used to construct laminar airflow filters and hoods to prevent excess particles entering the air. Turbulent, or non-unidirectional, airflow uses both laminar airflow hoods and nonspecific velocity filters to keep air in a cleanroom in constant motion, although not all in the same direction. The
391:
filters employing laminar or turbulent airflow principles. Laminar, or unidirectional, airflow systems direct filtered air downward or in horizontal direction in a constant stream towards filters located on walls near the cleanroom floor or through raised perforated floor panels to be recirculated.
714:
Both FS 209E and ISO 14644-1 assume log-log relationships between particle size and particle concentration. For that reason, zero particle concentration does not exist. Some classes do not require testing some particle sizes, because the concentration is too low or too high to be practical to test
504:
return air to the negative pressure plenum via low wall air returns. The air then is pulled by HEPA fan filter units back into the cleanroom. The air is constantly recirculating and by continuously passing through HEPA filtration removing particles from the air each time. Another advantage of this
476:
problems. This is a particular concern within the semiconductor business, because static discharge can easily damage modern circuit designs. On the other hand, active ions in the air can harm exposed components as well. Because of this, most workers in high electronics and semiconductor facilities
1732:
when we seek out contact with other planets, there is a biological hazard both ways: we must not contaminate any sample return missions from other stellar bodies with terrestrial microbes, and we must not contaminate possible other ecosystems existing in other planets. Thus, even by international
1724:
patients sometimes have to be held in prolonged isolation from their surroundings, for fear of infection. At the extreme, this necessitates a cleanroom environment. The same is the case for patients carrying airborne infectious diseases, only they are handled at negative, not positive pressure.
229:
Cleanrooms can range from the very small to the very large. On the one hand, a single-user laboratory can be built to cleanroom standards within several square meters, and on the other, entire manufacturing facilities can be contained within a cleanroom with factory floors covering thousands of
397:
rough air seeks to trap particles that may be in the air and drive them towards the floor, where they enter filters and leave the cleanroom environment. US FDA and EU have laid down stringent guidelines and limits to ensure freedom from microbial contamination in pharmaceutical products.
295:) filters to remove internally generated contaminants. Special lighting fixtures, walls, equipment and other materials are used to minimize the generation of airborne particles. Plastic sheets can be used to restrict air turbulence if the cleanroom design is of the laminar airflow type.
183:. Whitfield designed his cleanroom with a constant, highly filtered airflow to flush out impurities. Within a few years of its invention in the 1960s, Whitfield's modern cleanroom had generated more than US$ 50 billion in sales worldwide (approximately $ 483 billion today).
448:
so if any leaks occur, air leaks out of the chamber instead of unfiltered air coming in. This is most typically the case in semiconductor manufacturing, where even minute amounts of particulates leaking in could contaminate the whole process, while anything leaking out
481:
while working. Low-level cleanrooms may only require special shoes, with completely smooth soles that do not track in dust or dirt. However, for safety reasons, shoe soles must not create slipping hazards. Access to a cleanroom is usually restricted to those wearing a
341:. Many cleanrooms have a "tunnel" design in which there are spaces called "service chases" that serve as air plenums carrying the air from the bottom of the room to the top so that it can be recirculated and filtered at the top of the cleanroom.
160:-1 level 1 certified cleanroom permits no particles in that size range, and just 12 particles for each cubic meter of 0.3 μm and smaller. Semiconductor facilities often get by with level 7 or 5, while level 1 facilities are exceedingly rare.
602:
The greatest threat to cleanroom contamination comes from the users themselves. In the healthcare and pharmaceutical sectors, control of microorganisms is important, especially microorganisms likely to be deposited into the air stream from
819:
187:
Boeing, and North
American Aviation. RCA began such a conversion of part of its Cambridge, Ohio facilities in February 1961. Totalling 70,000 square feet, it was used to prepare control equipment for the Minuteman ICBM missles.
718:
Because 1 m is about 35 ft, the two standards are mostly equivalent when measuring 0.5 μm particles, although the testing standards differ. Ordinary room air is around class 1,000,000 or ISO 9.
1457:
EU GMP guidelines are more stringent than others, requiring cleanrooms to meet particle counts at operation (during manufacturing process) and at rest (when manufacturing process is not carried out, but room
1445:
503B pertaining to outsourcing facilities need direct supervision from a licensed pharmacist and do not need to be a licensed pharmacy. Facility is licensed through the Food and Drug
Administration (FDA)
1220:
Sample collection limitations for both particles in low concentrations and sizes greater than 1 μm make classification at this particle size inappropriate due to potential particle losses in the sampling
1688:
BS 5295 Class 1 also requires that the greatest particle present in any sample can not exceed 5 μm. BS 5295 has been superseded, withdrawn since the year 2007 and replaced with "BS EN ISO 14644-6:2007".
457:, with the exhaust being passed through high-efficiency filters, and further sterilizing procedures. Both are still cleanrooms because the particulate level inside is maintained within very low limits.
230:
square meters. Between the large and the small, there are also modular cleanrooms. They have been argued to lower costs of scaling the technology, and to be less susceptible to catastrophic failure.
700:
A discrete, light-scattering airborne particle counter is used to determine the concentration of airborne particles, equal to and larger than the specified sizes, at designated sampling locations.
1224:
In order to specify this particle size in association with ISO Class 5, the macroparticle descriptor M may be adapted and used in conjunction with at least one other particle size. (See C.7.)
746:
may be an issue. Since the strictest standards have been achieved only for space applications, it is sometimes difficult to know whether they were achieved in vacuum or standard conditions.
313:
Equipment inside any cleanroom is designed to generate minimal air contamination. The selection of material for the construction of a cleanroom should not generate any particulates; hence,
1907:
493:(known as a "gray room") is used to put on cleanroom clothing. This practice is common in many nuclear power plants, which operate as low-grade inverse pressure cleanrooms, as a whole.
133:
manufacturing. A cleanroom is designed to keep everything from dust to airborne organisms or vaporised particles away from it, and so from whatever material is being handled inside it.
850:
878:
of airborne particles that are equal to, or larger, than the considered particle size which is rounded to the nearest whole number, using no more than three significant figures,
611:
is of importance for microbiologists and quality control personnel to assess changes in trends. Shifts in the types of microflora may indicate deviations from the "norm" such as
302:
levels inside a cleanroom are tightly controlled, because they affect the efficiency and means of air filtration. If a particular room requires low enough humidity to make
920:
898:
179:, Whitfield created the initial plans for the cleanroom in 1960. Prior to Whitfield's invention, earlier cleanrooms often had problems with particles and unpredictable
2169:
Sandle, T (November 2012). "Application of quality risk management to set viable environmental monitoring frequencies in biotechnology processing and support areas".
1211:
All concentrations in the table are cumulative, e.g. for ISO Class 5, the 10 200 particles shown at 0,3 μm include all particles equal to and greater than this size.
757:
960:
940:
876:
1740:
Since larger cleanrooms are very sensitive controlled environments upon which multibillion-dollar industries depend, sometimes they are even fitted with numerous
739:
689:
Cleanrooms are classified according to the number and size of particles permitted per volume of air. Large numbers like "class 100" or "class 1000" refer to
198:, along with the chemical tanks and benches used in the "wet process" building of integrated circuits. These three companies were the pioneers of the use of
2590:
2532:
693:, and denote the number of particles of size 0.5 μm or larger permitted per cubic foot of air. The standard also allows interpolation; for example
2732:
2742:
2642:"BS 5295-0:1989 - Environmental cleanliness in enclosed spaces. General introduction, terms and definitions for clean rooms and clean air devices"
1244:
233:
With such a wide area of application, not every cleanroom is the same. For example, the rooms utilized in semiconductor manufacturing need not be
129:, and actively cleansed. Such rooms are commonly needed for scientific research and in industrial production for all nanoscale processes, such as
2268:"Chemical compatibility of fused filament fabrication-based 3-D printed components with solutions commonly used in semiconductor wet processing"
2031:
1914:
711:
of the number of particles 0.1 μm or larger permitted per m of air. So, for example, an ISO class 5 cleanroom has at most 10 particles/m.
392:
Laminar airflow systems are typically employed across 80% of a cleanroom ceiling to maintain constant air processing. Stainless steel or other
1697:
USP 800 is a United States standard developed by the United States
Pharmacopeial Convention (USP) with an effective date of December 1, 2019.
2467:
2432:"ISO 14644-1:2015 - Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness by particle concentration"
453:. The opposite is done, e.g., in the case of high-level bio-laboratories that handle dangerous bacteria or viruses; those are always held at
1955:
William (Bill) C. McElroy Jr., MicroAire
Engineering Manager and acting VP; Kay Plastics Engineering Manager; PureAire Drafting Room Manager
194:
were made by three companies: MicroAire, PureAire, and Key
Plastics. These competitors made laminar flow units, glove boxes, cleanrooms and
489:
In cleanrooms in which the standards of air contamination are less rigorous, the entrance to the cleanroom may not have an air shower. An
1214:
These concentrations will lead to large air sample volumes for classification. Sequential sampling procedure may be applied; see Annex D.
322:
682:
2572:
2097:"Effectiveness of a shielded ultraviolet C air disinfection system in an inpatient pharmacy of a tertiary care children's hospital"
1850:
2267:
310:. Static discharge is of particular concern in the electronics industry, where it can instantly destroy components and circuitry.
2406:
1824:
203:
2145:
1248:
2616:
1804:
35:
2013:
1436:
Drug
Quality and Security Act (DQSA) created in Nov. 2013 in response to drug compounding deaths and serious adverse events.
2547:
2722:
2077:
735:
30:
This article is about the manufacturing or research environment. For the method used to avoid copyright infringement, see
2501:
2262:
Heikkinen, Ismo T.S.; Kauppinen, Christoffer; Liu, Zhengjun; Asikainen, Sanja M.; Spoljaric, Steven; Seppälä, Jukka V.;
1439:
The
Federal Food, Drug, and Cosmetic Act (FD&C Act) created specific guidelines and policies for human compounding.
234:
176:
2662:
520:
In order to minimize the carrying of particulate by a person moving into the cleanroom, staff enter and leave through
215:
586:
1876:
306:
a concern, it too will be controlled by, e.g., introducing controlled amounts of charged ions into the air using a
287:
Within, air is constantly recirculated through fan units containing high-efficiency particulate absorbing filters (
245:, while nanotechnology absolutely requires it. What then is common to all cleanrooms is strict control of airborne
1442:
503A addresses compounding by state or federally licensed facility by licensed personnel (pharmacist/ physicians)
585:
are used. Cleaning chemicals used tend to involve sticky elements to trap dust, and may need a second step with
2594:
250:
429:
501:
425:
1216:
Concentration limits are not applicable in this region of the table due to very high particle concentration.
473:
433:
393:
199:
145:
1218:
Sampling and statistical limitations for particles in low concentrations make classification inappropriate.
826:
674:
2316:
Pasanen, T.P.; von
Gastrow, G.; Heikkinen, I.T.S.; Vähänissi, V.; Savin, H.; Pearce, J.M. (January 2019).
1741:
752:
defines the maximum concentration of particles per class and per particle size with the following formula
571:
454:
137:
618:
In assessing cleanroom microorganisms, the typical flora are primarily those associated with human skin (
237:(i.e., free of uncontrolled microbes), while the ones used in biotechnology usually must be. Vice versa,
1784:
627:
508:
612:
2363:
478:
314:
1982:
742:(ISO). The former applies to cleanrooms in general (see table below), the latter to cleanrooms where
679:
574:
with cleanroom processing fluids as well as ensured to generate a low level of particle generation.
424:
the air. UV devices can be fitted into ceiling light fixtures and irradiate air, killing potentially
219:
2707:
2219:
2171:
619:
604:
334:
330:
141:
589:
to clear. Cleanroom furniture is designed to produce a minimum of particles and is easy to clean.
2690:
2641:
2345:
2298:
2244:
2196:
1995:
1855:
1819:
1794:
1432:
Current regulating bodies include ISO, USP 800, US FED STD 209E (previous standard, still used).
623:
592:
A cleanroom is as much a process and a meticulous culture to maintain, as it is a space as such.
303:
265:
136:
A cleanroom can also prevent the escape of materials. This is often the primary aim in hazardous
2483:
903:
881:
2526:
2463:
2337:
2290:
2236:
2188:
2126:
2118:
1789:
1779:
1761:
1721:
1714:
1710:
814:{\displaystyle {\text{C}}_{\text{N}}=10^{\text{N}}\left({\frac {0.1}{\text{D}}}\right)^{2.08}}
525:
445:
195:
31:
2318:"Compatibility of 3-D printed devices in cleanroom environments for semiconductor processing"
1946:
Koslow, Jules. “Industry’s
Pursuit of Cleanliness.” Electronic Age 22:3 (Summer 1963), 22-25.
1937:
Koslow, Jules. “Industry’s Pursuit of Cleanliness.” Electronic Age 22:3 (Summer 1963), 22-25.
326:
2737:
2329:
2282:
2228:
2217:
Sandle, T (November 2011). "A review of cleanroom microflora: types, trends, and patterns".
2180:
2108:
2049:
1886:
1814:
1809:
1774:
1573:
559:
307:
172:
86:
54:
1799:
945:
925:
855:
644:
529:
406:
90:
2431:
1965:
329:. Corners like the wall to wall, wall to floor, wall to ceiling are avoided by providing
2727:
638:
552:
483:
398:
238:
191:
39:
2410:
366:
2716:
2349:
2302:
1241:
743:
223:
202:
for airguns, chemical pumps, scrubbers, water guns, and other devices needed for the
130:
126:
17:
2388:
2248:
354:
2620:
2317:
1237:
690:
373:
337:
to avoid any deposition or generation of particles at the joints, by vibration and
318:
277:
253:
of air, surfaces, workers entering the room, implements, chemicals, and machinery.
246:
122:
105:
73:
2457:
2286:
2200:
1769:
1734:
1459:
662:
656:
632:
469:
417:
402:
281:
65:
58:
2333:
2232:
2184:
2113:
2096:
962:
m. The result for standard particle sizes is expressed in the following table.
630:) are also detected, although in lower number. Common bacterial genera include
256:
Sometimes particulates exiting the compartment are also of concern, such as in
226:, and any other field that is highly sensitive to environmental contamination.
2686:
2263:
1755:
1751:
1729:
608:
410:
97:
2508:
2341:
2294:
2122:
749:
731:
727:
708:
704:
533:
421:
325:
and ceiling panel are used instead of iron alloys prone to rusting and then
169:
157:
2240:
2192:
2130:
2095:
Guimera, Don; Trzil, Jean; Joyner, Joy; Hysmith, Nicholas D. (2018-02-01).
121:
is an engineered space that maintains a very low concentration of airborne
1706:
650:
490:
465:
338:
299:
257:
149:
1881:
622:), although microorganisms from other sources such as the environment (
567:
548:
521:
180:
81:
45:
694:
582:
544:
50:
2708:
Cleanroom Wiki--The Global Society For Contamination Control (GSFCC)
2459:
Cleanroom Technology: Fundamentals of Design, Testing and Operation
383:
Cleanrooms maintain particulate-free air through the use of either
190:
The majority of the integrated circuit manufacturing facilities in
2407:"Cleanroom Classification / Particle Count / FS209E / ISO TC209 /"
540:
261:
241:
need not be absolutely pure of nanoscale inorganic salts, such as
104:
96:
80:
72:
64:
44:
1713:
are similar to cleanrooms for surgical patients' operations with
461:
388:
384:
292:
288:
242:
1737:
must be sterile, and so to be handled in cleanroom conditions.
2573:"FD&C Act Provisions that Apply to Human Drug Compounding"
578:
570:
tools used in cleanrooms must be carefully determined to be
852:
is the maximum concentration of particles in a volume of 1m
555:
are often excluded because they shed particulates in use.
2364:"Cleanroom and Controlled Environment Attire - ANSI Blog"
685:. NASA maintains a standard of 100,000 class in the SSPF.
2050:"Lecture 30: Cleanroom design and contamination control"
2615:
Market Venture Philippines Inc. web site (2006-04-19).
2571:
Research, Center for Drug Evaluation and (2019-02-09).
49:
Cleanroom used for the production of microsystems. The
321:
floor coating is preferred. Buffed stainless steel or
948:
928:
906:
884:
858:
829:
760:
505:
design is that air conditioning can be incorporated.
2693:
from the original on 2021-12-12 – via YouTube.
2212:
2210:
416:
In addition to air filters, cleanrooms can also use
1851:"Willis Whitfield, Clean Room Inventor, Dies at 92"
284:using progressively finer filters to exclude dust.
214:A cleanroom is a necessity in the manufacturing of
1983:In NASA's Sterile Areas, Plenty of Robust Bacteria
1913:. Cleanroom online. September 2015. Archived from
954:
934:
914:
892:
870:
844:
813:
323:powder-coated mild steel sandwich partition panels
1877:"Sandia physicist, cleanroom inventor dies at 92"
1744:systems to prevent costly equipment malfunction.
715:for, but such blanks should not be read as zero.
451:would not be harmful to the surrounding community
1251:on November 29, 2001, but is still widely used.
562:and microorganisms detected and counted through
740:International Organization for Standardization
168:The modern cleanroom was invented by American
2322:Materials Science in Semiconductor Processing
1247:standard. It was officially cancelled by the
512:that it cannot accommodate air conditioning.
468:to such low levels that extra equipment like
101:Cleanroom cabin for precision measuring tools
8:
1908:"Willis Whitfield - Father of the Cleanroom"
670:Cleanroom classification and standardization
528:stage) and wear protective clothing such as
125:. It is well isolated, well controlled from
34:. For the software project methodology, see
1996:"Kenall Cleanroom and Containment Lighting"
1717:to prevent any infections for the patient.
558:Particle levels are usually tested using a
276:First, outside air entering a cleanroom is
2389:"Space Station Processing Facility (SSPF)"
77:Entrance to a cleanroom with no air shower
2591:"Understanding Cleanroom Classifications"
2146:"UV helps maintain cleanroom air quality"
2112:
947:
927:
907:
905:
885:
883:
862:
857:
836:
831:
828:
805:
791:
780:
767:
762:
759:
697:is maintained as a class 2000 cleanroom.
360:Airflow pattern for "Turbulent Cleanroom"
27:Dust-free room for research or production
2687:"Semiconductor Technology at TSMC, 2011"
1584:
1578:
1470:
1464:
1259:
1253:
970:
964:
673:
333:, and all joints need to be sealed with
1844:
1842:
1840:
1836:
599:
436:and the extension of HVAC filter life.
156:certified cleanroom. By comparison, an
2531:: CS1 maint: archived copy as title (
2524:
1701:Ramifications and further applications
53:(red-green) lighting is necessary for
2101:American Journal of Infection Control
942:m and 0.1 is a constant expressed in
845:{\displaystyle {\text{C}}_{\text{N}}}
707:standards, which specify the decimal
615:or problems with cleaning practices.
596:Personnel contamination of cleanrooms
497:Recirculating vs. one pass cleanrooms
486:, including the necessary machinery.
291:), and/or ultra-low particulate air (
7:
2484:"Federal Standard 209E Cancellation"
1966:"What is a Cleanroom? | Mecart"
678:The cleanroom processing bay of the
57:, to prevent unwanted exposure of
25:
683:Space Station Processing Facility
532:, face masks, gloves, boots, and
204:production of integrated circuits
2733:Semiconductor device fabrication
1825:Semiconductor device fabrication
1754:
564:environmental monitoring methods
365:
353:
61:to light of shorter wavelengths.
2078:"Cleanroom Air Flow Principles"
1985:New York Times, 9. October 2007
1849:Yardley, William (2012-12-04).
1249:General Services Administration
922:is the size of the particle in
587:light molecular weight solvents
432:includes a reduced reliance on
2743:Telecommunications engineering
2014:"Fitting lights in cleanrooms"
1805:Pressure room (disambiguation)
444:Some cleanrooms are kept at a
280:and cooled by several outdoor
109:Typical cleanroom head garment
36:Cleanroom software engineering
1:
2548:"NUFAB SAFETY & PROTOCOL"
440:Cleanrooms of different kinds
93:installed in the ceiling grid
2456:W. Whyte (17 October 2001).
1425:
1396:
1373:
1350:
1327:
1304:
1204:
1181:
1158:
1135:
1109:
1084:
1059:
654:, and fungal genera include
577:When cleaning, only special
177:Sandia National Laboratories
2287:10.1016/j.addma.2018.07.015
2018:www.cleanroomtechnology.com
1733:law, any probes we send to
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1024:
1021:
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1010:
1008:
1006:
1004:
1001:
738:standards developed by the
2759:
2334:10.1016/j.mssp.2018.08.027
2233:10.5731/pdajpst.2011.00765
2185:10.5731/pdajpst.2012.00891
2114:10.1016/j.ajic.2017.07.026
1720:In another case, severely
915:{\displaystyle {\text{D}}}
893:{\displaystyle {\text{N}}}
38:. For the TV episode, see
29:
2462:. John Wiley & Sons.
1693:USP <800> standards
1581:
1478:
1475:
1467:
1262:
1256:
1209:
973:
967:
900:is the ISO class number,
723:ISO 14644-1 and ISO 14698
539:Common materials such as
251:secondary decontamination
2144:outsourcing-pharma.com.
974:FED STD 209E equivalent
524:(sometimes including an
502:Recirculating cleanrooms
472:are required to prevent
430:UV-based decontamination
175:. As an employee of the
2617:"What is a Clean Room?"
2220:PDA J Pharm Sci Technol
2172:PDA J Pharm Sci Technol
703:Small numbers refer to
474:electrostatic discharge
426:infectious particulates
2275:Additive Manufacturing
2150:outsourcing-pharma.com
1742:seismic base isolation
956:
936:
916:
894:
872:
846:
815:
686:
434:chemical disinfectants
394:non shedding materials
220:rechargeable batteries
110:
102:
94:
78:
70:
69:Cleanroom from outside
62:
1785:Contamination control
1453:EU GMP classification
1260:Maximum particles/ft
957:
937:
917:
895:
873:
847:
816:
677:
607:. Studying cleanroom
572:chemically compatible
372:Airflow pattern for "
266:radioactive materials
108:
100:
84:
76:
68:
48:
18:Class 1000 (standard)
2723:Cleanroom technology
2393:science.ksc.nasa.gov
1585:Maximum particles/m
1471:Maximum particles/m
971:Maximum particles/m
955:{\displaystyle \mu }
946:
935:{\displaystyle \mu }
926:
904:
882:
871:{\displaystyle ^{3}}
856:
827:
758:
464:systems control the
413:, may also be used.
298:Air temperature and
620:Gram-positive cocci
516:Operating procedure
509:One pass cleanrooms
268:are being handled.
89:manufacturing with
1972:. August 16, 2016.
1856:The New York Times
1820:Secure environment
1795:Indoor air quality
952:
932:
912:
890:
868:
842:
811:
687:
628:Gram-negative rods
624:Gram-positive rods
345:Airflow principles
304:static electricity
272:Basic construction
111:
103:
95:
79:
71:
63:
2689:. 26 March 2011.
2469:978-0-471-86842-2
2438:. 21 January 2016
2082:www.thomasnet.com
1970:MECART Cleanrooms
1790:Data recovery lab
1780:Air quality index
1762:Technology portal
1722:immunocompromised
1686:
1685:
1565:
1564:
1430:
1429:
1229:
1228:
910:
888:
839:
834:
799:
798:
783:
770:
765:
613:resistant strains
600:
455:negative pressure
446:positive pressure
418:ultraviolet light
32:Clean room design
16:(Redirected from
2750:
2695:
2694:
2683:
2677:
2676:
2674:
2673:
2659:
2653:
2652:
2650:
2649:
2638:
2632:
2631:
2629:
2628:
2619:. Archived from
2612:
2606:
2605:
2603:
2602:
2593:. Archived from
2587:
2581:
2580:
2568:
2562:
2561:
2559:
2557:
2552:
2544:
2538:
2536:
2530:
2522:
2520:
2519:
2513:
2507:. Archived from
2506:
2498:
2492:
2491:
2480:
2474:
2473:
2453:
2447:
2446:
2444:
2443:
2428:
2422:
2421:
2419:
2418:
2409:. Archived from
2403:
2397:
2396:
2385:
2379:
2378:
2376:
2375:
2360:
2354:
2353:
2313:
2307:
2306:
2272:
2266:(October 2018).
2259:
2253:
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2214:
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2160:
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2141:
2135:
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2116:
2092:
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2067:
2065:
2063:
2054:
2046:
2040:
2039:
2028:
2022:
2021:
2010:
2004:
2003:
1992:
1986:
1980:
1974:
1973:
1962:
1956:
1953:
1947:
1944:
1938:
1935:
1929:
1928:
1926:
1925:
1919:
1912:
1904:
1898:
1897:
1895:
1894:
1887:Associated Press
1873:
1867:
1866:
1864:
1863:
1846:
1815:Pneumatic filter
1810:Particle counter
1775:Air conditioning
1764:
1759:
1758:
1579:
1574:British Standard
1465:
1411:
1409:
1254:
965:
961:
959:
958:
953:
941:
939:
938:
933:
921:
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918:
913:
911:
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899:
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877:
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869:
867:
866:
851:
849:
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840:
837:
835:
832:
820:
818:
817:
812:
810:
809:
804:
800:
796:
792:
785:
784:
781:
772:
771:
768:
766:
763:
744:biocontamination
736:non-governmental
565:
560:particle counter
479:conductive boots
452:
407:fan filter units
369:
357:
315:monolithic epoxy
308:corona discharge
249:, possibly with
173:Willis Whitfield
91:fan filter units
87:microelectronics
55:photolithography
21:
2758:
2757:
2753:
2752:
2751:
2749:
2748:
2747:
2713:
2712:
2704:
2699:
2698:
2685:
2684:
2680:
2671:
2669:
2663:"USP 800 | USP"
2661:
2660:
2656:
2647:
2645:
2640:
2639:
2635:
2626:
2624:
2614:
2613:
2609:
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2598:
2589:
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2570:
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2555:
2553:
2550:
2546:
2545:
2541:
2523:
2517:
2515:
2511:
2504:
2502:"Archived copy"
2500:
2499:
2495:
2482:
2481:
2477:
2470:
2455:
2454:
2450:
2441:
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2430:
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2416:
2414:
2405:
2404:
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2387:
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2362:
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2315:
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2310:
2270:
2261:
2260:
2256:
2216:
2215:
2208:
2168:
2167:
2163:
2154:
2152:
2143:
2142:
2138:
2094:
2093:
2089:
2076:
2075:
2071:
2061:
2059:
2052:
2048:
2047:
2043:
2032:"Cleanroom LED"
2030:
2029:
2025:
2012:
2011:
2007:
1994:
1993:
1989:
1981:
1977:
1964:
1963:
1959:
1954:
1950:
1945:
1941:
1936:
1932:
1923:
1921:
1917:
1910:
1906:
1905:
1901:
1892:
1890:
1875:
1874:
1870:
1861:
1859:
1848:
1847:
1838:
1833:
1800:Microfiltration
1760:
1753:
1750:
1703:
1695:
1570:
1455:
1407:
1405:
1264:
1234:
1232:US FED STD 209E
1225:
1222:
1219:
1217:
1215:
1212:
944:
943:
924:
923:
902:
901:
880:
879:
859:
854:
853:
830:
825:
824:
787:
786:
776:
761:
756:
755:
725:
672:
645:Corynebacterium
598:
563:
518:
460:Some cleanroom
450:
442:
381:
380:
379:
378:
377:
370:
362:
361:
358:
347:
274:
260:into dangerous
239:operating rooms
212:
166:
43:
28:
23:
22:
15:
12:
11:
5:
2756:
2754:
2746:
2745:
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2715:
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2711:
2710:
2703:
2702:External links
2700:
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2654:
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2539:
2493:
2475:
2468:
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2423:
2398:
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2355:
2308:
2254:
2227:(4): 392–403.
2206:
2161:
2136:
2107:(2): 223–225.
2087:
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2041:
2023:
2005:
1987:
1975:
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1207:
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1203:
1200:
1197:
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1192:
1190:
1188:
1184:
1183:
1182:Class 100,000
1180:
1177:
1174:
1171:
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1167:
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1011:
1009:
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1003:
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996:
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992:
989:
986:
983:
980:
976:
975:
972:
969:
951:
931:
865:
861:
808:
803:
795:
790:
779:
775:
724:
721:
671:
668:
639:Staphylococcus
597:
594:
553:natural fibers
517:
514:
484:cleanroom suit
441:
438:
371:
364:
363:
359:
352:
351:
350:
349:
348:
346:
343:
273:
270:
216:semiconductors
211:
208:
192:Silicon Valley
165:
162:
85:Cleanroom for
40:The Clean Room
26:
24:
14:
13:
10:
9:
6:
4:
3:
2:
2755:
2744:
2741:
2739:
2736:
2734:
2731:
2729:
2726:
2724:
2721:
2720:
2718:
2709:
2706:
2705:
2701:
2692:
2688:
2682:
2679:
2668:
2664:
2658:
2655:
2643:
2637:
2634:
2623:on 2012-08-28
2622:
2618:
2611:
2608:
2597:on 2016-06-01
2596:
2592:
2586:
2583:
2578:
2574:
2567:
2564:
2549:
2543:
2540:
2534:
2528:
2514:on 2008-05-28
2510:
2503:
2497:
2494:
2489:
2485:
2479:
2476:
2471:
2465:
2461:
2460:
2452:
2449:
2437:
2433:
2427:
2424:
2413:on 2008-02-14
2412:
2408:
2402:
2399:
2394:
2390:
2384:
2381:
2369:
2368:The ANSI Blog
2365:
2359:
2356:
2351:
2347:
2343:
2339:
2335:
2331:
2327:
2323:
2319:
2312:
2309:
2304:
2300:
2296:
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2258:
2255:
2250:
2246:
2242:
2238:
2234:
2230:
2226:
2222:
2221:
2213:
2211:
2207:
2202:
2198:
2194:
2190:
2186:
2182:
2179:(6): 560–79.
2178:
2174:
2173:
2165:
2162:
2151:
2147:
2140:
2137:
2132:
2128:
2124:
2120:
2115:
2110:
2106:
2102:
2098:
2091:
2088:
2083:
2079:
2073:
2070:
2058:
2051:
2045:
2042:
2037:
2033:
2027:
2024:
2019:
2015:
2009:
2006:
2001:
1997:
1991:
1988:
1984:
1979:
1976:
1971:
1967:
1961:
1958:
1952:
1949:
1943:
1940:
1934:
1931:
1920:on 2021-01-27
1916:
1909:
1903:
1900:
1888:
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1858:
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1801:
1798:
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1776:
1773:
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1768:
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1763:
1757:
1752:
1747:
1745:
1743:
1738:
1736:
1731:
1726:
1723:
1718:
1716:
1712:
1708:
1700:
1698:
1692:
1690:
1666:
1665:
1646:
1645:
1626:
1625:
1606:
1605:
1601:
1598:
1595:
1592:
1590:≥0.5 μm
1589:
1588:
1580:
1577:
1575:
1572:BS 5295 is a
1567:
1560:
1557:
1554:
1551:
1548:
1547:
1543:
1540:
1537:
1534:
1531:
1530:
1526:
1523:
1520:
1517:
1514:
1513:
1509:
1506:
1503:
1500:
1497:
1496:
1492:
1489:
1486:
1483:
1482:
1479:In Operation
1474:
1466:
1463:
1461:
1452:
1444:
1441:
1440:
1438:
1435:
1434:
1433:
1401:
1400:
1378:
1377:
1355:
1354:
1332:
1331:
1309:
1308:
1286:
1285:
1281:
1279:≥0.5 μm
1278:
1276:≥0.3 μm
1275:
1273:≥0.2 μm
1272:
1270:≥0.1 μm
1269:
1268:
1255:
1252:
1250:
1246:
1243:
1242:United States
1239:
1231:
1223:
1208:
1186:
1185:
1163:
1162:
1159:Class 10,000
1140:
1139:
1114:
1113:
1089:
1088:
1064:
1063:
1040:
1039:
1036:
1018:
1017:
1014:
998:
997:
993:
990:
988:≥0.5 μm
987:
985:≥0.3 μm
984:
982:≥0.2 μm
981:
979:≥0.1 μm
978:
977:
966:
963:
949:
929:
863:
860:
821:
806:
801:
793:
788:
777:
773:
753:
751:
747:
745:
741:
737:
733:
729:
722:
720:
716:
712:
710:
706:
701:
698:
696:
692:
684:
681:
676:
669:
667:
665:
664:
659:
658:
653:
652:
647:
646:
641:
640:
635:
634:
629:
626:) and water (
625:
621:
616:
614:
610:
606:
605:skin shedding
595:
593:
590:
588:
584:
580:
575:
573:
569:
561:
556:
554:
550:
546:
542:
537:
535:
531:
527:
523:
515:
513:
510:
506:
503:
499:
498:
494:
492:
487:
485:
480:
477:have to wear
475:
471:
467:
463:
458:
456:
447:
439:
437:
435:
431:
427:
423:
419:
414:
412:
409:, along with
408:
404:
400:
395:
390:
386:
375:
368:
356:
344:
342:
340:
336:
335:epoxy sealant
332:
331:coved surface
328:
324:
320:
316:
311:
309:
305:
301:
296:
294:
290:
285:
283:
279:
271:
269:
267:
263:
259:
254:
252:
248:
244:
240:
236:
231:
227:
225:
224:life sciences
221:
217:
209:
207:
205:
201:
197:
193:
188:
184:
182:
178:
174:
171:
163:
161:
159:
153:
151:
147:
146:pharmaceutics
143:
139:
134:
132:
131:semiconductor
128:
127:contamination
124:
120:
116:
107:
99:
92:
88:
83:
75:
67:
60:
56:
52:
47:
41:
37:
33:
19:
2681:
2670:. Retrieved
2666:
2657:
2646:. Retrieved
2636:
2625:. Retrieved
2621:the original
2610:
2599:. Retrieved
2595:the original
2585:
2576:
2566:
2554:. Retrieved
2542:
2516:. Retrieved
2509:the original
2496:
2488:www.iest.org
2487:
2478:
2458:
2451:
2440:. Retrieved
2435:
2426:
2415:. Retrieved
2411:the original
2401:
2392:
2383:
2372:. Retrieved
2370:. 2015-07-15
2367:
2358:
2325:
2321:
2311:
2278:
2274:
2257:
2224:
2218:
2176:
2170:
2164:
2153:. Retrieved
2149:
2139:
2104:
2100:
2090:
2081:
2072:
2060:. Retrieved
2056:
2044:
2035:
2026:
2017:
2008:
1999:
1990:
1978:
1969:
1960:
1951:
1942:
1933:
1922:. Retrieved
1915:the original
1902:
1891:. Retrieved
1889:. 2012-11-26
1880:
1871:
1860:. Retrieved
1854:
1739:
1727:
1719:
1704:
1696:
1687:
1602:≥25 μm
1599:≥10 μm
1571:
1561:Not defined
1558:Not defined
1493:5.0 μm
1490:0.5 μm
1487:5.0 μm
1484:0.5 μm
1456:
1431:
1238:FED-STD-209E
1235:
1213:
1136:Class 1,000
822:
754:
748:
726:
717:
713:
702:
699:
691:FED-STD-209E
688:
661:
655:
649:
643:
637:
631:
617:
601:
591:
576:
557:
538:
519:
507:
500:
496:
495:
488:
470:air ionizers
459:
443:
415:
403:air handlers
382:
374:Laminar Flow
319:polyurethane
312:
297:
286:
282:air handlers
275:
255:
247:particulates
232:
228:
213:
189:
185:
167:
154:
142:nuclear work
135:
123:particulates
118:
114:
112:
2667:www.usp.org
2556:24 February
2264:Savin, Hele
1770:Air ionizer
1735:outer space
1596:≥5 μm
1593:≥1 μm
1282:≥5 μm
1265:equivalent
1196:35,200,000
994:≥5 μm
991:≥1 μm
750:ISO 14644-1
728:ISO 14644-1
705:ISO 14644-1
663:Penicillium
657:Aspergillus
633:Micrococcus
411:sticky mats
264:, or where
196:air showers
59:photoresist
2717:Categories
2672:2020-04-13
2648:2016-04-18
2627:2007-06-02
2601:2015-08-21
2537:, page 148
2518:2008-04-17
2442:2016-09-12
2417:2008-03-05
2374:2018-11-24
2281:: 99–107.
2155:2020-04-15
2000:kenall.com
1924:2016-05-18
1893:2012-12-03
1862:2013-06-22
1831:References
1730:exobiology
1653:1,000,000
1552:3,520,000
1541:3,520,000
1199:8,320,000
1173:3,520,000
1118:1,000,000
1110:Class 100
609:microflora
551:made from
526:air shower
376:Cleanroom"
119:clean room
2350:105579272
2342:1369-8001
2328:: 59–67.
2303:139867946
2295:2214-8604
2123:0196-6553
2057:najah.edu
1715:incisions
1707:hospitals
1205:Room air
1085:Class 10
950:μ
930:μ
732:ISO 14698
709:logarithm
534:coveralls
422:disinfect
170:physicist
158:ISO 14644
115:cleanroom
2691:Archived
2527:cite web
2249:25970142
2241:22293526
2193:23183652
2131:28865936
1748:See also
1711:theatres
1676:200,000
1667:Class 4
1647:Class 3
1630:300,000
1627:Class 2
1607:Class 1
1549:Grade D
1535:352,000
1532:Grade C
1524:352,000
1515:Grade B
1498:Grade A
1476:At Rest
1462:is on).
1420:100,000
1417:300,000
1414:750,000
1402:100,000
1382:350,000
1202:293,000
1176:832,000
1150:352,000
1124:102,000
1121:237,000
1093:100,000
1060:Class 1
651:Bacillus
522:airlocks
491:anteroom
466:humidity
401:between
339:friction
300:humidity
278:filtered
258:research
210:Overview
181:airflows
150:virology
2738:Filters
2062:1 March
2036:Philips
1679:40,000
1673:
1670:
1656:20,000
1650:
1642:
1633:
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1568:BS 5295
1555:29,000
1544:29,000
1391:10,000
1388:30,000
1385:75,000
1379:10,000
1359:35,000
1245:federal
1221:system.
1179:29,300
1153:83,200
1127:35,200
1099:10,200
1096:23,700
1068:10,000
583:buckets
568:Polymer
549:fabrics
545:pencils
399:Plenums
327:flaking
262:viruses
235:sterile
164:History
138:biology
2644:. 2016
2466:
2348:
2340:
2301:
2293:
2247:
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2191:
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1682:4,000
1659:4,000
1636:2,000
1610:3,000
1582:Class
1538:2,900
1527:2,900
1518:3,520
1507:3,520
1501:3,520
1468:Class
1426:ISO 8
1397:ISO 7
1374:ISO 6
1368:1,000
1362:7,500
1356:1,000
1351:ISO 5
1336:3,500
1328:ISO 4
1305:ISO 3
1302:0.007
1257:Class
1240:was a
1187:ISO 9
1164:ISO 8
1156:2,930
1141:ISO 7
1130:8,320
1115:ISO 6
1102:3,520
1090:ISO 5
1074:1,020
1071:2,370
1065:ISO 4
1044:1,000
1041:ISO 3
1019:ISO 2
999:ISO 1
968:Class
823:Where
695:SNOLAB
648:, and
547:, and
222:, the
200:Teflon
51:yellow
2728:Rooms
2551:(PDF)
2512:(PDF)
2505:(PDF)
2346:S2CID
2299:S2CID
2271:(PDF)
2245:S2CID
2197:S2CID
2053:(PDF)
1918:(PDF)
1911:(PDF)
1365:3000
1325:0.07
541:paper
530:hoods
2558:2016
2533:link
2464:ISBN
2338:ISSN
2291:ISSN
2237:PMID
2201:7970
2189:PMID
2127:PMID
2119:ISSN
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1882:KWES
1662:300
1423:830
1348:0.7
1345:100
1342:300
1339:750
1333:100
1313:350
1293:7.5
1133:293
1105:832
1077:352
1050:102
1047:237
1022:100
807:2.08
734:are
730:and
660:and
581:and
579:mops
462:HVAC
405:and
389:ULPA
385:HEPA
293:ULPA
289:HEPA
243:rust
218:and
148:and
2577:FDA
2436:ISO
2330:doi
2283:doi
2229:doi
2181:doi
2109:doi
1728:In
1705:In
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1460:AHU
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1290:35
1263:ISO
1236:US
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