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14 nm process

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582:. The new fabrication plant was to be named Fab 42, and construction was meant to start in the middle of 2011. Intel billed the new facility as "the most advanced, high-volume manufacturing facility in the world," and said it would come on line in 2013. Intel since decided to postpone opening this facility and instead upgrade its existing facilities to support 14-nm chips. On May 17, 2011, Intel announced a roadmap for 2014 that included "14 nm" transistors for their 51: 1578: 436:
Since at least 1997, "process nodes" have been named purely on a marketing basis, and have no relation to the dimensions on the integrated circuit; neither gate length, metal pitch or gate pitch on a "14nm" device is fourteen nanometers. For example, TSMC and Samsung's "10 nm" processes are
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width, using a sidewall spacer process. It had erstwhile been suggested in 2003 that for the 16 nm node, a logic transistor would have a gate length of about 5 nm. In December 2007, Toshiba demonstrated a prototype memory unit that used 15-nanometre thin lines.
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processors, the first product to be manufactured on Intel's "14 nm" manufacturing process. The first systems based on the Core M processor were to become available in Q4 2014 — according to the press release. "Intel's 14 nanometer technology uses second-generation
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materials. The extent of damage is typically 20 nm thick, but can also go up to about 100 nm. The damage sensitivity is expected to get worse as the low-k materials become more porous. For comparison, the atomic radius of an unconstrained
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Lower numbers are better, except for transistor density, in which case the opposite is true. Transistor gate pitch is also referred to as CPP (contacted poly pitch), and interconnect pitch is also referred to as MMP (minimum metal pitch).
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to deliver industry-leading performance, power, density and cost per transistor," said Mark Bohr, Intel senior fellow, Technology and Manufacturing Group, and director, Process Architecture and Integration.
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Noh, M-S.; et al. (2010). Dusa, Mircea V; Conley, Will (eds.). "Implementing and validating double patterning in 22-nm to 16-nm product design and patterning flows".
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Kaneko, A; Yagashita, A; Yahashi, K; Kubota, T; et al. (2005). "Sidewall transfer process and selective gate sidewall spacer formation technology for sub-15nm
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nm FinFET process in 2001. In 2002, an international team of researchers at UC Berkeley, including Shibly Ahmed (Bangladeshi), Scott Bell, Cyrus Tabery (Iranian),
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architecture, incorporating "14 nm" FinFET technology from Samsung which had erstwhile been licensed to GlobalFoundries for GlobalFoundries to build.
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Gross, T.; et al. (2008). "Detection of nanoscale etch and ash damage to nanoporous methyl silsesquioxane using electrostatic force microscopy".
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said, " will be shipping by the end of this year." However, as of February 2014, shipment had at time erstwhile been delayed further until Q4 2014.
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Ahmed, Shibly; Bell, Scott; Tabery, Cyrus; Bokor, Jeffrey; Kyser, David; Hu, Chenming; Liu, Tsu-Jae King; Yu, Bin; Chang, Leland (December 2002).
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On July 22, 2018, GlobalFoundries announced their "12 nm" Leading-Performance (12LP) process, based on a licensed 14LP process from Samsung.
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Central Research Laboratory began collaborating with an international team of researchers on further developing FinFET technology, including
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Tela Innovations and Sequoia Design Systems developed a methodology allowing double exposure for the "16 nm"/"14 nm" node circa 2010.
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Axelrad, V.; et al. (2010). Rieger, Michael L; Thiele, Joerg (eds.). "16nm with 193nm immersion lithography and double exposure".
2064: 2040: 1931: 615: 2282: 2087: 2960: 3226: 3150: 2561: 905:, which were made on TSMC's "12 nm" process and had a transistor density of 24.67 million transistors per square millimeter. 3377: 38: 2850: 2707: 2440: 2350: 854:
architecture, which incorporated "14 nm" FinFET technology from Samsung. The technology had at that time been licensed to
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material induced by different patterning plasma processes studied by energy filtered and analytical scanning TEM".
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In December 2009, National Nano Device Laboratories, owned by the Taiwanese government, produced a "16 nm"
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had also, at that time, begun implementing double patterning in "22 nm" and "16 nm" design flows.
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On September 5, 2014, Intel launched the first three Broadwell-based processors that belonged to the
305: 2536: 2382: 1737: 2319:"Intel Discloses Newest Microarchitecture and 14 Nanometer Manufacturing Process Technical Details" 1738:"Exclusive: Is Intel Really Starting To Lose Its Process Lead? 7nm Node Slated For Release in 2022" 1281: 923: 680: 579: 544: 528: 521: 448: 3175: 2250: 2093: 1899: 1856: 851: 505: 438: 2466:"Samsung Announces Mass Production of Industry's First 14nm FinFET Mobile Application Processor" 1719:"14nm, 7nm, 5nm: How low can CMOS go? It depends if you ask the engineers or the economists..." 705:
In August 2014, Intel announced details of the "14 nm" microarchitecture for its upcoming
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is 0.11 nm. Thus about 90 Si atoms would span the channel length, leading to substantial
423: 113: 3100:"Intel Announces 7th Gen Kaby Lake: 14nm PLUS, Six Notebook SKUs, Desktop coming in January" 2995: 2242: 2135: 2075: 2031: 1891: 1848: 1813: 1786: 780: 711: 639: 320: 309: 295: 86: 77: 2101: 1939: 2894: 2819: 2781: 2296: 1268: 938: 855: 552: 383: 335: 3022:"Samsung Announces Second-Gen 14nm Low Power Plus (14LPP) Process Now In Mass Production" 122: 104: 95: 2238: 1932:"IBM and ARM to Collaborate on Advanced Semiconductor Technology for Mobile Electronics" 1887: 1844: 1677: 3303:"International Technology Roadmap for Semiconductors 2.0 2015 Edition Executive Report" 2974: 699: 657:
demonstrated a 15 nm FinFET process, with a 15 nm gate length and 10 nm
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The resolutions of a "14 nm" device are difficult to achieve in a polymeric
3336:"SMIC Begins Volume Production of 14 nm FinFET Chips: China's First FinFET Line" 1722: 795: 631: 611: 2139: 2079: 1817: 1790: 813:
chips that are fabricated in both "14 nm" by Samsung and "16 nm" by
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researchers. In 1998, the team successfully fabricated devices down to a 17
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reported taping out "16 nm" test chips in 2010. On January 17, 2011,
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In February 2015, Samsung announced that their flagship smartphones, the
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In 2018 a shortage of "14 nm" fab capacity was announced by Intel.
445:" processes are dimensionally similar to Intel's "10 nm" process. 2537:"Apple's new A9 and A9X processors promise 'desktop-class performance'" 2225:
Hübler, Arved; et al. (2011). "Printed Paper Photovoltaic Cells".
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Richard, O.; et al. (2007). "Sidewall damage in silica-based low-
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International Technology Roadmap for Semiconductors lithography nodes
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somewhere between Intel's "14 nm" and "10 nm" processes in
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6100 and two cores running at 3.1 GHz, using only 28 watts.
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The 12 nm, 14 nm, and 16 nm fabrication nodes are discussed here.
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taped out a "14 nm" chip in 2014, before manufacturing
2895:"7nm vs 10nm vs 14nm: Fabrication Process - Tech Centurion" 2851:"VLSI 2018: GlobalFoundries 12nm Leading-Performance, 12LP" 2708:"VLSI 2018: GlobalFoundries 12nm Leading-Performance, 12LP" 891:
nm" FinFET process from TSMC and was designed for use with
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Core M family: Core M-5Y10, Core M-5Y10a, and Core M-5Y70.
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A more significant limitation comes from plasma damage to
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technology and Samsung's "14 nm" FinFET technology.
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IEEE Spectrum: Technology, Engineering, and Science News
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IEEE International Electron Devices Meeting (IEDM 2005)
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In September 2018, Nvidia released GPUs based on their
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announced the development of "15 nm" NAND cells.
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architecture, which incorporates TSMC's "16 nm"
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announced that it would construct a new $ 5 billion
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to develop "14 nm" chip processing technology.
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technology that is a non-planar evolution of planar
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International Technology Roadmap for Semiconductors
2174:. Archived from the original on December 13, 2007. 1644: 1572: 2269:"Samsung reveals its first 14nm FinFET test chip" 1993:"Intel shelves cutting-edge Arizona chip factory" 887:processor, introduced in October 2017, used a "16 602:In the late 1990s, Hisamoto's Japanese team from 2671:"Hot Chips 2018: NEC Vector Processor Live Blog" 2297:"Intel postpones Broadwell availability to 4Q14" 1023: 406:(ITRS). Until about 2011, the node following "22 805:On September 25, 2015, Apple Inc. released the 2072:Digest. International Electron Devices Meeting 817:(Taiwan Semiconductor Manufacturing Company). 356: 8: 2154:"Intel scientists find wall for Moore's Law" 2441:"Intel launches first Broadwell processors" 2044:. Symposium on VLSI Technology Short Course 1693:"A Brief History of Process Node Evolution" 1015: 475:nm" FinFET production. The following year, 2036:"FinFET: History, Fundamentals and Future" 1980:Update: Intel to build fab for 14-nm chips 1645:{\displaystyle {\rm {Transistors/mm^{2}}}} 636:Taiwan Semiconductor Manufacturing Company 363: 349: 34: 1634: 1622: 1588: 1587: 1585: 1416: 1312: 1305: 1304: 1302: 559:announced that they were teaming up with 455:NAND flash chips in 2013. The same year, 3360: 3227:"Samsung's 14 nm LPE FinFET transistors" 1918:"Mentor moves tools toward 16-nanometer" 912: 869:, which utilized "16 nm" by TSMC. 508:also limit reliable resolution to about 2130:with elevated source/drain extension". 1669: 1257: 504:. In addition, the chemical effects of 37: 3346:from the original on November 15, 2019 3278:"16 nm lithography process - WikiChip" 3253:"14 nm lithography process - WikiChip" 2177: 2026: 2024: 1033:Transistor density (MTr/mm) 1007: 990: 982: 2936:"Let's Clear Up the Node Naming Mess" 2701: 2699: 2697: 2695: 2693: 2439:Shvets, Anthony (September 7, 2014). 2065:"FinFET scaling to 10 nm gate length" 622:nm process. They later developed a 15 7: 2870:"TSMC Announces 6-Nanometer Process" 2535:Vincent, James (September 9, 2015). 2510:"Intel Core i7-5557U specifications" 1954:"Intel to build fab for 14-nm chips" 3074:"Intel's 14nm Technology in Detail" 2285:. The Register. September 10, 2013. 2200:"16nm SRAM produced – Taiwan Today" 974: 872:On March 2, 2017, AMD released its 379:refers to a marketing term for the 2299:. Digitimes.com. February 12, 2014 2041:University of California, Berkeley 1938:. January 17, 2011. Archived from 1878:. Optical Microlithography XXIII. 1631: 1627: 1619: 1616: 1613: 1610: 1607: 1604: 1601: 1598: 1595: 1592: 1589: 1559: 1556: 1553: 1550: 1544: 1541: 1538: 1535: 1529: 1526: 1523: 1520: 1514: 1511: 1508: 1505: 1499: 1496: 1493: 1490: 1485: 1482: 1479: 1476: 1473: 1467: 1464: 1458: 1455: 1452: 1449: 1443: 1440: 1437: 1434: 1428: 1425: 1422: 1419: 1401: 1398: 1395: 1392: 1386: 1383: 1380: 1377: 1368: 1365: 1362: 1359: 1354: 1351: 1348: 1345: 1342: 1336: 1333: 1324: 1321: 1318: 1315: 25: 2669:Cutress, Ian (August 21, 2018). 2416:. April 11, 2013. Archived from 2202:. taiwantoday.tw. Archived from 1678:"No More Nanometers – EEJournal" 694:laptop that used a "14 nm" 483:nm" scale devices to consumers. 49: 3210:"Intel 14nm Process Technology" 2868:Schor, David (April 16, 2019). 683:taped out a "14 nm" chip. 572:semiconductor fabrication plant 2849:Schor, David (July 22, 2018). 2706:Schor, David (July 22, 2018). 2271:. Engadget. December 21, 2012. 966: 762:class" NAND flash production. 1: 2934:Bohr, Mark (March 28, 2017). 2603:Smith, Ryan (July 28, 2016). 776:, would feature "14 nm" 386:that is the successor to the 2168:"15 Nanometre Memory Tested" 730:began mass-production of "16 459:began mass-production of "16 1920:. EETimes. August 23, 2010. 1806:Microelectronic Engineering 1779:Microelectronic Engineering 1177:Transistor fin height (nm) 1070:Transistor gate pitch (nm) 3421: 3180:and chips correspondingly 2156:. ZDNet. December 1, 2003. 1956:. EE Times. Archived from 1151:Transistor fin width (nm) 1125:Transistor fin pitch (nm) 903:Turing (microarchitecture) 790:released the "Early 2015" 410:nm" was expected to be "16 26: 2321:. Intel. August 11, 2014. 2227:Advanced Energy Materials 2184:: CS1 maint: unfit URL ( 2140:10.1109/IEDM.2005.1609488 2080:10.1109/IEDM.2002.1175825 1818:10.1016/j.mee.2007.07.014 1791:10.1016/j.mee.2006.10.058 1297:Intel uses this formula: 1191: 1188: 1185: 1182: 1165: 1162: 1159: 1156: 1139: 1136: 1133: 1130: 1113: 1110: 1107: 1104: 1087: 1081: 1078: 1075: 1050: 1044: 1038: 937: 932: 927: 922: 502:electron beam lithography 1099:Interconnect pitch (nm) 402:nm" was so named by the 3378:manufacturing processes 3188:Encyclopædia Britannica 1218:2013 Q4 risk production 807:iPhone 6S & 6S Plus 2247:10.1002/aenm.201100394 1646: 1574: 566:On February 18, 2011, 377:"14 nanometer process" 32:MOSFET technology node 1744:. September 10, 2016. 1647: 1575: 885:NEC SX-Aurora TSUBASA 774:Galaxy S6 and S6 Edge 514:immersion lithography 2897:. November 26, 2019. 2830:on December 27, 2018 2792:on September 5, 2017 2747:"16/12nm Technology" 2735:. September 4, 2020. 2383:"16/12nm Technology" 2134:. pp. 844–847. 2074:. pp. 251–254. 1942:on January 21, 2011. 1584: 1301: 920:Ground Rules (2015) 712:tri-gate transistors 3231:Electronics EETimes 3190:. December 22, 2017 3020:Frumusanu, Andrei. 2994:Frumusanu, Andrei. 2337:www.extremetech.com 2239:2011AdEnM...1.1018H 1999:. January 14, 2014. 1960:on February 2, 2013 1888:2010SPIE.7640E..0SN 1845:2010SPIE.7641E..09A 1003:14 nm ++ 909:14 nm process nodes 861:On August 2, 2016, 858:for dual sourcing. 800:Intel Iris Graphics 686:In September 2013, 681:Samsung Electronics 672:In September 2011, 522:multiple patterning 449:Samsung Electronics 3315:on October 2, 2016 3233:. January 20, 2016 1642: 1570: 876:CPUs based on the 850:GPUs based on the 786:On March 9, 2015, 679:In December 2012, 506:ionizing radiation 479:began shipping "14 439:transistor density 398:nm") node. The "14 3393: 3392: 3383:Succeeded by 3130:www.anandtech.com 3104:www.anandtech.com 3078:www.anandtech.com 3052:www.anandtech.com 3026:www.anandtech.com 3000:www.anandtech.com 2206:on March 20, 2016 2034:(June 11, 2012). 2032:Tsu-Jae King, Liu 1936:IBM Press release 1896:10.1117/12.848194 1853:10.1117/12.846677 1762:. March 12, 2018. 1691:Shukla, Priyank. 1563: 1549: 1534: 1519: 1504: 1472: 1463: 1448: 1433: 1405: 1391: 1376: 1341: 1332: 1254: 1253: 1000:14 nm + 918:ITRS Logic Device 826:GeForce 10 series 424:multi-gate MOSFET 373: 372: 16:(Redirected from 3412: 3364:Preceded by 3361: 3356: 3355: 3353: 3351: 3331: 3325: 3324: 3322: 3320: 3314: 3308:. 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3358: 3357: 3326: 3294: 3269: 3244: 3218: 3201: 3167: 3142: 3124:Howse, Brett. 3116: 3098:Cutress, Ian. 3090: 3064: 3038: 3012: 2986: 2966: 2952: 2940:Intel Newsroom 2926: 2900: 2886: 2860: 2841: 2803: 2765: 2738: 2724: 2689: 2661: 2636: 2618: 2595: 2574: 2553: 2527: 2501: 2475: 2457: 2431: 2413:Tom's Hardware 2399: 2374: 2342: 2324: 2310: 2288: 2274: 2260: 2217: 2191: 2159: 2145: 2118: 2088: 2055: 2020: 2002: 1984: 1971: 1945: 1923: 1909: 1866: 1823: 1812:(2): 401–407. 1796: 1785:(3): 517–523. 1765: 1747: 1729: 1717:Hruska, Joel. 1709: 1683: 1668: 1666: 1663: 1654: 1653: 1637: 1633: 1629: 1625: 1621: 1618: 1615: 1612: 1609: 1606: 1603: 1600: 1597: 1594: 1591: 1567: 1561: 1558: 1555: 1552: 1546: 1543: 1540: 1537: 1531: 1528: 1525: 1522: 1516: 1513: 1510: 1507: 1501: 1498: 1495: 1492: 1487: 1484: 1481: 1478: 1475: 1469: 1466: 1460: 1457: 1454: 1451: 1445: 1442: 1439: 1436: 1430: 1427: 1424: 1421: 1415: 1412: 1409: 1403: 1400: 1397: 1394: 1388: 1385: 1382: 1379: 1373: 1370: 1367: 1364: 1361: 1356: 1353: 1350: 1347: 1344: 1338: 1335: 1329: 1326: 1323: 1320: 1317: 1311: 1308: 1290: 1273: 1265:Second-sourced 1256: 1255: 1252: 1251: 1248: 1245: 1242: 1239: 1236: 1233: 1230: 1227: 1224: 1221: 1216: 1213: 1210: 1207: 1204: 1200: 1199: 1196: 1193: 1190: 1187: 1184: 1181: 1178: 1174: 1173: 1170: 1167: 1164: 1161: 1158: 1155: 1152: 1148: 1147: 1144: 1141: 1138: 1135: 1132: 1129: 1126: 1122: 1121: 1118: 1115: 1112: 1109: 1106: 1103: 1100: 1096: 1095: 1092: 1089: 1086: 1083: 1080: 1077: 1074: 1071: 1067: 1066: 1063: 1060: 1057: 1054: 1049: 1046: 1043: 1040: 1037: 1034: 1030: 1029: 1026: 1020: 1012: 1004: 1001: 998: 995: 987: 979: 971: 963: 960: 957: 954: 953:16/14 nm 951: 947: 946: 941: 936: 931: 926: 921: 916: 910: 907: 842:In June 2016, 723: 720: 700:Brian Krzanich 599: 596: 524:are required. 520:materials and 493: 490: 488: 485: 441:, and TSMC's " 418:nm" nodes use 371: 370: 368: 367: 360: 353: 345: 342: 341: 339: 338: 333: 328: 323: 318: 313: 303: 298: 293: 286: 283: 282: 280: 279: 268: 265: 264: 262: 261: 252: 243: 234: 225: 216: 207: 198: 189: 180: 171: 162: 156: 150: 144: 138: 132: 126: 117: 108: 99: 90: 81: 71: 68: 67: 59:MOSFET scaling 55: 54: 46: 45: 31: 24: 14: 13: 10: 9: 6: 4: 3: 2: 3417: 3406: 3403: 3402: 3400: 3389: 3388: 3382: 3380: 3379: 3376: 3372: 3370: 3369: 3363: 3362: 3345: 3341: 3337: 3330: 3327: 3311: 3304: 3298: 3295: 3283: 3279: 3273: 3270: 3258: 3254: 3248: 3245: 3232: 3228: 3222: 3219: 3211: 3205: 3202: 3189: 3185: 3183: 3182:more powerful 3179: 3171: 3168: 3156: 3152: 3146: 3143: 3131: 3127: 3120: 3117: 3105: 3101: 3094: 3091: 3079: 3075: 3072:Smith, Ryan. 3068: 3065: 3053: 3049: 3042: 3039: 3027: 3023: 3016: 3013: 3001: 2997: 2990: 2987: 2982: 2981: 2976: 2970: 2967: 2962: 2956: 2953: 2941: 2937: 2930: 2927: 2914: 2910: 2904: 2901: 2896: 2890: 2887: 2875: 2874:WikiChip Fuse 2871: 2864: 2861: 2856: 2855:WikiChip Fuse 2852: 2845: 2842: 2826: 2822: 2821: 2813: 2807: 2804: 2788: 2784: 2783: 2775: 2774:"PB14LPP-1.0" 2769: 2766: 2754: 2753: 2748: 2742: 2739: 2734: 2728: 2725: 2713: 2712:WikiChip Fuse 2709: 2702: 2700: 2698: 2696: 2694: 2690: 2678: 2677: 2672: 2665: 2662: 2650: 2646: 2640: 2637: 2632: 2628: 2622: 2619: 2606: 2599: 2596: 2584: 2578: 2575: 2563: 2557: 2554: 2542: 2538: 2531: 2528: 2515: 2511: 2505: 2502: 2489: 2485: 2479: 2476: 2471: 2467: 2461: 2458: 2446: 2442: 2435: 2432: 2419: 2415: 2414: 2409: 2403: 2400: 2388: 2384: 2378: 2375: 2362: 2358: 2357: 2352: 2346: 2343: 2338: 2334: 2328: 2325: 2320: 2314: 2311: 2298: 2292: 2289: 2284: 2278: 2275: 2270: 2264: 2261: 2256: 2252: 2248: 2244: 2240: 2236: 2232: 2228: 2221: 2218: 2205: 2201: 2195: 2192: 2187: 2181: 2173: 2169: 2163: 2160: 2155: 2149: 2146: 2141: 2137: 2133: 2129: 2122: 2119: 2103: 2099: 2095: 2091: 2089:0-7803-7462-2 2085: 2081: 2077: 2073: 2066: 2059: 2056: 2043: 2042: 2037: 2033: 2027: 2025: 2021: 2016: 2012: 2006: 2003: 1998: 1994: 1988: 1985: 1982: 1981: 1975: 1972: 1959: 1955: 1949: 1946: 1941: 1937: 1933: 1927: 1924: 1919: 1913: 1910: 1905: 1901: 1897: 1893: 1889: 1885: 1881: 1877: 1870: 1867: 1862: 1858: 1854: 1850: 1846: 1842: 1838: 1834: 1827: 1824: 1819: 1815: 1811: 1807: 1800: 1797: 1792: 1788: 1784: 1780: 1776: 1769: 1766: 1761: 1760:eejournal.com 1757: 1751: 1748: 1743: 1739: 1733: 1730: 1725: 1724: 1720: 1713: 1710: 1698: 1694: 1687: 1684: 1679: 1673: 1670: 1664: 1662: 1660: 1635: 1623: 1565: 1413: 1410: 1407: 1371: 1327: 1309: 1306: 1294: 1291: 1283: 1277: 1274: 1270: 1266: 1261: 1258: 1249: 1246: 1243: 1240: 1237: 1234: 1231: 1228: 1225: 1222: 1217: 1214: 1211: 1208: 1205: 1202: 1201: 1197: 1194: 1179: 1176: 1175: 1171: 1168: 1153: 1150: 1149: 1145: 1142: 1127: 1124: 1123: 1119: 1116: 1101: 1098: 1097: 1093: 1090: 1084: 1072: 1069: 1068: 1064: 1061: 1058: 1055: 1047: 1041: 1035: 1032: 1031: 1027: 1021: 1013: 1005: 1002: 999: 996: 994:(12 nm) 988: 980: 972: 964: 961: 958: 955: 952: 950:Process name 949: 948: 945: 942: 940: 935: 930: 925: 917: 915: 914: 908: 906: 904: 899: 896: 894: 886: 881: 879: 875: 870: 868: 865:released the 864: 859: 857: 853: 849: 848:Radeon RX 400 846:released its 845: 840: 838: 834: 831:based on the 830: 827: 824:released its 823: 820:In May 2016, 818: 816: 812: 808: 803: 801: 797: 793: 789: 784: 782: 779: 775: 770: 768: 763: 761: 753: 749: 741: 737: 729: 721: 719: 716: 713: 708: 703: 701: 697: 696:Broadwell CPU 693: 689: 684: 682: 677: 675: 670: 668: 663: 660: 656: 651: 650:gate length. 649: 645: 641: 637: 633: 629: 628:Jeffrey Bokor 617: 613: 609: 605: 597: 595: 593: 589: 585: 581: 577: 573: 569: 564: 562: 558: 554: 550: 546: 541: 539: 535: 530: 525: 523: 519: 515: 511: 507: 503: 499: 491: 486: 484: 478: 470: 466: 458: 454: 453:"10 nm class" 450: 446: 444: 440: 434: 432: 429: 425: 421: 405: 393: 385: 382: 378: 366: 361: 359: 354: 352: 347: 346: 344: 343: 337: 334: 332: 329: 327: 326:Semiconductor 324: 322: 319: 317: 314: 311: 307: 304: 302: 299: 297: 294: 292: 289: 288: 285: 284: 277: 271: 270: 267: 266: 259: 253: 250: 244: 241: 235: 232: 226: 223: 217: 214: 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Retrieved 3339: 3329: 3317:. Retrieved 3310:the original 3297: 3287:February 17, 3285:. Retrieved 3281: 3272: 3262:February 17, 3260:. Retrieved 3256: 3247: 3237:February 17, 3235:. Retrieved 3230: 3221: 3204: 3192:. Retrieved 3187: 3181: 3177: 3170: 3158:. Retrieved 3154: 3145: 3133:. Retrieved 3129: 3119: 3107:. Retrieved 3103: 3093: 3081:. Retrieved 3077: 3067: 3055:. Retrieved 3051: 3041: 3029:. Retrieved 3025: 3015: 3003:. Retrieved 2999: 2989: 2978: 2969: 2955: 2943:. Retrieved 2939: 2929: 2919:November 14, 2917:. Retrieved 2912: 2903: 2889: 2877:. Retrieved 2873: 2863: 2854: 2844: 2834:November 28, 2832:. Retrieved 2825:the original 2818: 2812:"PB12LP-1.1" 2806: 2796:November 28, 2794:. Retrieved 2787:the original 2780: 2768: 2758:November 12, 2756:. Retrieved 2750: 2741: 2727: 2715:. Retrieved 2711: 2680:. Retrieved 2674: 2664: 2652:. Retrieved 2648: 2639: 2630: 2621: 2609:. Retrieved 2598: 2586:. Retrieved 2577: 2565:. Retrieved 2556: 2544:. Retrieved 2540: 2530: 2518:. Retrieved 2513: 2504: 2492:. Retrieved 2488:EveryMac.com 2487: 2478: 2469: 2460: 2448:. Retrieved 2444: 2434: 2422:. Retrieved 2418:the original 2411: 2402: 2390:. Retrieved 2377: 2365:. Retrieved 2361:the original 2354: 2345: 2336: 2327: 2313: 2303:February 13, 2301:. Retrieved 2291: 2277: 2263: 2230: 2226: 2220: 2210:December 16, 2208:. Retrieved 2204:the original 2194: 2172:The Inquirer 2171: 2162: 2148: 2131: 2121: 2111:December 10, 2109:. Retrieved 2102:the original 2071: 2058: 2046:. Retrieved 2039: 2014: 2005: 1996: 1987: 1979: 1974: 1964:February 22, 1962:. Retrieved 1958:the original 1948: 1940:the original 1935: 1926: 1912: 1879: 1875: 1869: 1836: 1832: 1826: 1809: 1805: 1799: 1782: 1778: 1774: 1768: 1759: 1750: 1742:wccftech.com 1741: 1732: 1721: 1712: 1700:. Retrieved 1696: 1686: 1672: 1661: 1657: 1293: 1276: 1260: 1019:(12 nm) 1011:(14 nm) 986:(16 nm) 978:(16 nm) 970:(16 nm) 900: 897: 882: 871: 860: 841: 819: 804: 785: 771: 764: 725: 717: 704: 685: 678: 671: 664: 652: 614:and various 601: 565: 542: 526: 500:, even with 495: 447: 435: 433:technology. 414:nm". All "14 376: 374: 278: ~ 2025 260: – 2022 251: – 2020 242: – 2018 233: – 2016 224: – 2014 221: 215: – 2012 206: – 2010 197: – 2009 188: – 2007 179: – 2005 170: – 2003 161: – 2001 155: – 1999 149: – 1996 143: – 1993 137: – 1990 131: – 1987 125: – 1984 116: – 1981 107: – 1977 98: – 1974 89: – 1971 80: – 1968 29: 2975:"SMIC-14nm" 2945:December 6, 2631:ExtremeTech 2607:. Anandtech 1723:ExtremeTech 1288:nm process. 1028:14 nm 796:MacBook Pro 632:Chenming Hu 616:UC Berkeley 612:Chenming Hu 316:Moore's law 159:130 nm 153:180 nm 147:250 nm 141:350 nm 135:600 nm 129:800 nm 114:1.5 μm 43:fabrication 2588:August 13, 2567:August 25, 2546:August 27, 1882:: 76400S. 1876:Proc. SPIE 1839:: 764109. 1833:Proc. SPIE 1665:References 997:14 nm 867:Xbox One S 788:Apple Inc. 736:NAND flash 492:Background 465:NAND flash 310:multi-gate 291:Half-nodes 231:10 nm 222:14 nm 213:22 nm 204:28 nm 195:32 nm 186:45 nm 177:65 nm 168:90 nm 87:10 μm 78:20 μm 3340:AnandTech 3160:August 1, 3135:August 1, 3109:August 1, 3083:August 1, 3057:August 1, 3031:August 1, 3005:August 1, 2676:AnandTech 2654:March 21, 2541:The Verge 2520:March 18, 2514:CPU World 2494:March 18, 2450:March 18, 2445:CPU World 2015:AnandTech 1904:120545900 1414:× 1310:× 1280:Based on 1198:Un­known 1195:Un­known 1172:Un­known 1169:Un­known 1160:Un­known 1146:Un­known 1143:Un­known 1120:Un­known 1117:Un­known 1094:Un­known 1091:Un­known 1062:Un­known 1036:Un­known 863:Microsoft 742:began "16 726:In 2013, 692:Ultrabook 653:In 2005, 471:began "16 443:7 nm 276:2 nm 258:3 nm 249:5 nm 240:7 nm 123:1 μm 105:3 μm 96:6 μm 3399:Category 3344:Archived 3319:April 6, 3194:March 7, 2682:July 15, 2611:July 29, 2424:June 21, 2392:June 30, 2356:SK Hynix 2255:98247321 2180:cite web 1861:56158128 1247:2020 Q3 1215:2018 H2 1192:Un­known 1166:Un­known 1114:Un­known 783:(SoCs). 728:SK Hynix 549:Synopsys 518:Hardmask 457:SK Hynix 331:Industry 3178:smaller 3155:HPCwire 2879:May 31, 2717:May 31, 2367:July 8, 2235:Bibcode 2098:7106946 2048:July 9, 1997:Reuters 1884:Bibcode 1841:Bibcode 1702:July 9, 1282:Samsung 1235:2016 H2 1232:2014 Q3 1226:2016 Q2 1223:2015 Q3 1212:2016 Q1 1209:2014 Q4 924:Samsung 852:Polaris 792:MacBook 767:low-TDP 754:began " 752:Samsung 655:Toshiba 638:), and 604:Hitachi 576:Arizona 545:Samsung 538:leakage 534:silicon 487:History 428:silicon 394:(or "20 296:Density 269:Future 3375:MOSFET 2516:. 2015 2490:. 2015 2253:  2128:FinFET 2096:  2086:  1902:  1859:  1548:  1533:  1518:  1503:  1471:  1462:  1447:  1432:  1390:  1375:  1340:  1331:  1286:  1053:44.67 1045:28.88 1042:54.38 962:11LPP 893:NEC SX 889:  837:FinFET 833:Pascal 822:Nvidia 778:Exynos 758:  748:FinFET 744:  732:  707:Core M 669:chip. 644:FinFET 624:  620:  590:, and 580:wafers 498:resist 481:  473:  467:, and 461:  420:FinFET 416:  412:  408:  400:  396:  390:  381:MOSFET 306:Device 111:  41:device 3387:10 nm 3368:22 nm 3313:(PDF) 3306:(PDF) 3213:(PDF) 2828:(PDF) 2815:(PDF) 2790:(PDF) 2777:(PDF) 2251:S2CID 2105:(PDF) 2094:S2CID 2068:(PDF) 1900:S2CID 1857:S2CID 1284:'s 14 1250:2019 1238:2017 1229:2017 1206:2015 1059:36.71 1056:30.59 1048:33.8 1039:32.94 959:14LPP 956:14LPE 934:Intel 874:Ryzen 688:Intel 674:Hynix 648:10 nm 568:Intel 529:low-k 510:30 nm 477:Intel 3352:2019 3321:2017 3289:2017 3264:2017 3239:2017 3196:2018 3162:2024 3137:2024 3111:2024 3085:2024 3059:2024 3033:2024 3007:2024 2980:SIMC 2947:2018 2921:2018 2881:2019 2836:2022 2798:2022 2760:2022 2752:TSMC 2719:2019 2684:2019 2656:2018 2613:2016 2590:2016 2569:2015 2548:2017 2522:2015 2496:2015 2452:2015 2426:2019 2394:2019 2387:TSMC 2369:2019 2305:2014 2212:2009 2186:link 2113:2019 2084:ISBN 2050:2019 1966:2011 1880:7640 1837:7641 1704:2019 1244:2018 1241:2016 1183:~38 1051:37.5 944:SMIC 929:TSMC 883:The 829:GPUs 815:TSMC 794:and 746:nm" 740:TSMC 734:nm" 667:SRAM 608:TSMC 592:Atom 588:Core 584:Xeon 547:and 469:TSMC 463:nm" 431:CMOS 375:The 301:CMOS 2649:NEC 2243:doi 2136:doi 2076:doi 1892:doi 1849:doi 1814:doi 1787:doi 1411:0.4 1307:0.6 1267:to 1189:42 1186:37 1180:42 1137:42 1134:45 1131:49 1128:42 1111:52 1108:70 1105:67 1102:56 1085:84 1079:88 1076:78 1073:70 1065:30 1024:LP+ 1008:LPP 991:FFC 983:FFC 975:FF+ 878:Zen 844:AMD 659:fin 610:'s 574:in 561:ARM 557:IBM 392:nm" 388:"22 3401:: 3342:. 3338:. 3280:. 3255:. 3229:. 3186:. 3153:. 3128:. 3102:. 3076:. 3050:. 3024:. 2998:. 2977:. 2938:. 2911:. 2872:. 2853:. 2817:. 2779:. 2749:. 2710:. 2692:^ 2673:. 2647:. 2629:. 2539:. 2512:. 2486:. 2468:. 2443:. 2410:. 2385:. 2353:. 2335:. 2249:. 2241:. 2229:. 2182:}} 2178:{{ 2170:. 2092:. 2082:. 2070:. 2038:. 2023:^ 2013:. 1995:. 1934:. 1898:. 1890:. 1855:. 1847:. 1810:85 1808:. 1783:84 1781:. 1758:. 1740:. 1695:. 1580:# 1163:8 1157:8 1154:8 1140:48 1088:84 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1423:c 1420:S 1408:+ 1402:a 1399:e 1396:r 1393:A 1387:l 1384:l 1381:e 1378:C 1372:2 1369:D 1366:N 1363:A 1360:N 1355:t 1352:n 1349:u 1346:o 1343:C 1337:r 1334:T 1328:2 1325:D 1322:N 1319:A 1316:N 1271:. 634:( 364:e 357:t 350:v 312:) 308:( 228:0 219:0 210:0 201:0 192:0 183:0 174:0 165:0 84:0 75:0 66:) 62:( 20:)

Index

16 nm process
Semiconductor
device
fabrication


MOSFET scaling
process nodes
20 μm
10 μm
6 μm
3 μm
1.5 μm
1 μm
800 nm
600 nm
350 nm
250 nm
180 nm
130 nm
90 nm
65 nm
45 nm
32 nm
28 nm
22 nm
14 nm
10 nm
7 nm
5 nm
3 nm
2 nm
Half-nodes

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