281:
frequency in the range of 90-150 Hz. Settling time to +/- 1% Constant
Velocity, or + / - 1 um jitter, after high acceleration or high deceleration respectively, takes an estimated 3 bandwidth periods. For example, a 50 Hz servo bandwidth, having a 1 / 50 · 1000 = 20 msec period, will settle to 1 um position accuracy within an estimated 3 · 20 = 60 msec. The lowest natural frequency equals the square root of system stiffness divided by moving inertia. A typical linear recirculating bearing rail, of a high performance positioning stage, has a stiffness on order of 100-300 N/um. Such a performance is required in
216:
25:
1007:- Amplifying motion control signals to drive servo motors. Ranging from low power to 10s KW. For example, 40 KW in driving high force linear motor of 10,000 N moving at 4 m/s. DC voltage ranges from a safe 24V/48V to over 400 V. High current loop update rates, of motor signals, are on order of thousands of Hz. Popular network communication with motion controller is via
636:
409:
933:
for horizontal axes with 3 phase synchronized current in moving coil and field in stationary, low cogging, magnet plates. For vertical linear motor axes a counterbalance may be used. Rotary stages use similar 2 parts, direct drive motor, including a stationary coil armature and a moving magnetic
280:
or sub micron positioning accuracy with settling times on order of milliseconds and servo bandwidth of 30-50 Hz. Ball screw actuators, on the other hand, have typical bandwidth of 10-20 Hz and belt driven actuators at about 5-10 Hz. The bandwidth value of HPPS is about 1/3 of the lowest natural
400:
licensed Anorad's linear motor technology and integrated it as a complete solution with their CNC products line. And in 1998, Rockwell
Automation acquired Anorad to compete with Siemens and Fanuc in providing a complete linear motor solutions to drive high velocity machine tools in Automotive
198:
1440:
405:. Today linear motors are being used in hundreds of thousands high performance positioning systems, which drive manufacturing processes around the world. Their market is expected to grow, according to some studies, at 4.4% a year and reach $ 1.5B in 2025.
332:, with 1 m' reach, has a structural stiffness on the order of 1 N/um. That is why articulated robots are best being employed as automation equipment in processes which require position repeatability on the order of 100's microns, such as
911:
slide, base - High precision bases use granite for flatness and thermal stability. Lower precision standard stages use extruded aluminum. Custom stages typically use ribbed aluminum or stainless steel machined for low inertia high
1483:
965:
cable management - For power and signal transmission. The weakest link of the system reliability chain. Lower bend radius for low profile increases fatigue. Requires cable carrier or using flat ribbon cable. Introduce
189:
that connect their links, HPPS links typically consists of sliding joints, which are relatively stiffer than revolute joints. That is the reason why high performance positioning systems are often referred to as
125:
of yaw, pitch, roll. HPPS are used in many manufacturing processes to move an object (tool or part) smoothly and accurately in six degrees of freedom, along a desired path, at a desired orientation, with high
903:
Frame - Typically made of aluminum or steel weldments of hollow tubes, possibly filled in with concrete composite for damping. Mounted on leveling pads and secured to floor possibly with earthquake posts.
580:
Environment - Indicates the expected disturbance conditions that the system may encounter during operation within its life time including
Thermal, Humidity, Shock and Vibration, Cleanliness and Radiation.
698:
Gantry - Gantry configuration provides maximum work envelope in XYZ configuration per given size constraints. It has 2 parallel axes for x, controlled as a single axis or master / slave. Ideal for
1041:
System testing is an iterative process of system development, intended to validate system analysis modeling, proof of concepts, safety factor of performance specifications and acceptant testing.
514:- Indicates the resistance of the moving load (tool or part) to linear (kg) and angular (kg·m2) change in velocity. To maximize natural frequency the inertia of the moving load should be minimal.
1022:(CNC), single axis, multi axis, PC based, stand alone or integrated with servo drive and /or PLC, including I/O, auto tuning, diagnostic and programming available from multiple sources.
1466:
The goal...is to assist in developing rigorous, defensible test strategies to more effectively quantify and characterize system performance and provide information that reduces risk
507:
is an official interface between the application requirements (problem), as described by the user (customer) and the design (solution) as optimized by the developer (supplier).
328:
for non contact, frictionless actuation, high force and low inertia, and laser interferometer for sub micron position feedback. On the other hand, a typical 6 degrees of freedom
237:
46:
1220:
Magnetically levitating wafer tables that accelerate faster than a fighter jet?.. with an accuracy of 60 picometers... It's all part of the extreme mechanics in ASML machines.
1092:, Life test - Non stop operation for specified period without a failure in extreme operating conditions under continuous monitoring with frequent visual and sensor checking.
733:
System analysis is a process of understanding the relationships between design parameters, operating conditions, environmental variables and system performance based on
802:- Estimating 3D static errors at the point of interest as a function of axes straightness, flatness, pitch, yaw, roll, wobble and ran-outs using analysis tools such as
594:(°C) that the system may endure during operation. Effects structural deformations and precision. May require cooling, insulation and low thermal conductivity material.
157:, which means that the HPPS can reject all motion disturbing frequencies, which act at a lower frequency than the bandwidth. For higher frequency disturbances such as
568:
1428:
The
Renishaw XL-80 laser interferometer offers the ultimate in high performance measurement and calibration for motion systems, including CMMs and machine tools
551:
Constant velocity - Indicates the required smoothness of motion and allowed variations in (+/- %) of required constant velocity (m/s, rad/s) during motion.
1153:
Siemens and Anorad Corp. decided information was needed to support the major role high-performance linear motors will play as the prime machine-tool actuator.
517:
Size - Indicates the geometrical constraints of the system's width (m), length(m) and height (m), as may be needed for handling, transport as installation.
560:
Life - indicates the expected time (hrs) or travel (km) the most active degree of freedom of the system is expected to act reliably in process operation.
142:. It is designed to quickly stop its motion and accurately place the moving object at its desired final position and orientation with minimal jittering.
1166:
145:
HPPS requires a structural characteristics of low moving mass and high stiffness. The resulting system characteristic is a high value for the lowest
1527:
1294:
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915:
bearing - Options include cross roller bearing for relatively short travel, recirculating bearing for higher stiffness longer travel and
1458:
1111:
1299:... linear drives on all axes. The benefits: high speeds, very fast acceleration, high positioning accuracy and shear force-free drives
1260:
504:
1282:... achieving sub-micron level accuracy... using the machines Pneumatic Static Pressure Guideways and Linear Motor motion technology
899:
Component sizing is the process of selecting standard parts from component suppliers, or designing a custom part for manufacturing
614:
and other process disturbances. May require active or passive vibration isolation mounts and structural material with high damping.
263:
72:
1180:
1512:
1350:
631:
may require shielded cable management, non ferrous structural material and protective shields of the linear motor magnet plates.
937:
feedback - Typically high resolution encoder, optical, magnetic or captative, analog or digital, linear or rotary, absolute or
436:
653:
HPPS configuration is typically optimized for maximum structural stiffness with maximum damping and minimum inertia, smallest
1493:
691:
XYZR - Rotational axes including pitch, yaw and roll are typically added in HPPS for orienting the end of arm tool (EOAT) or
465:
241:
50:
1265:... XY Scanning Stage uses ... two linear motors to produce such accurate and reproducible results with stereo microscopes
1025:
380:. In parallel linear motor technology and their integration in HPPS, was expanded around the world. As a result, in 1996
276:
HPPS, driven by linear motors, can move at a combined high velocity on order of 3-5 m/s, high accelerations of 5-7 g, at
1532:
854:
628:
527:, including maximum travel (m, rad), maximum velocity (m/s, rad/s) and maximum acceleration/deceleration (m/s2, rad/s2).
476:
294:
1215:
1029:
930:
600:- Indicated the level of water vapors in the surrounding air (%). May include the required system protection based on
118:
620:- Indicates the allowable level (size and quantity per unit volume) of particles in the surrounding air. May require
226:
35:
880:
564:
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drive for high velocity. Their limitations in HPPS is friction, jitter, backlash, lower stiffness and maintenance.
245:
230:
54:
39:
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Motion travel, maximum velocity, maximum acceleration, jerk - Commonly provided within the motion controller.
1517:
986:
876:
577:(hrs), often associated with system manuals including, operation, maintenance schedule and spare parts list.
535:
479:
often require granite base, isolation mounts, linear motor actuators, air bearing and laser interferometer.
364:. Initially HPPS were used for high precision manufacturing processes in semiconductor applications such as
106:
548:- Indicates maximum amplitude (um) of high frequency vibrations which is allowed at stand still conditions.
799:
714:
539:
302:
122:
114:
816:
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487:
451:
369:
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Cycle time, settling time, jitter, constant velocity - Commonly provided within the motion controller.
1277:
1248:
VRM Linear Motor
Positioning System, High-accuracy (1μm resolution)... High acceleration – up to 2.5G
741:
494:, where linear motor positioning provides high acceleration / deceleration with short settling time.
1368:
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439:. It uses linear motor stages or maglev stages, for extreme positioning, to move its wafer stage.
1198:
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90:
677:, is typically available as a standard actuator (aka slide, axis or table) from many suppliers.
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process of integrating the best system components into the most compact, and responsive system.
1489:
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Thermal stability - Temperature sensors mounted at multiple location to observe heat transfer.
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Companies that manufacture motion control, motors, software or related products and equipment
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within a work envelope. Positioning could be done point to point or along a desired path of
94:
557:- Indicates the resistance of position change in response to external load (N/um, N·m/rad).
1079:
953:
888:
807:
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765:
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611:
201:
Example of custom XYZ configuration with linear motor stages for XY and a ball screw for Z
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profiles, dynamic accuracy, bearing loads, and motor power, using analysis tools such as
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Example of high performance positioning system with a system analysis simulation model
384:
integrated its CNC with Anorad linear motors to drive a 20 m' long
Maskant machine at
1506:
1316:
Achieving the high throughput and extraordinary accuracy necessary for lab automation
1148:
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833:
745:
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at the point of interest (POI), with minimum components and maximum maintainability.
393:
333:
282:
174:
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139:
1278:"Wire EDM Ultra-precise machining and surface finish for small/fine wire operations"
472:. Linear motor / air bearing positioning systems provide high smoothness of motion.
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use linear motor positioning stages for high smoothness of motion during scanning
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815:- Estimating stiffness of axes, frames, supports and mounting structures, using
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24:
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Increase
Throughput with Electromechanical Frequency Analysis and Optimization
949:
670:
654:
341:
998:
770:
635:
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554:
182:
1411:
Find 656 Programmable Logic
Controllers (PLC) suppliers with Engineering360
1048:
Linear accuracy, repeatability, flatness, straightness, yaw, pitch - Laser
713:
at various order to best meet the specifications. They are typically using
1008:
906:
871:
850:
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757:
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309:
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1459:"Reliability Test Planning for Mean Time Between Failures Best Practice"
684:. Z axis is typically actuated with a ball screw or linear motor with a
1233:"Fuzion Platform Technologies for Performance, Flexibility & Yield"
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is using high performance, linear motor, positioning systems to mount
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523:- Indicates process cycle time (s) and process constraints for each
1261:"Accurate and Reproducible Results Leica LMT260 XY Scanning Stage"
1216:"Speed and precision meet in ASML's advanced lithography machines"
634:
407:
397:
196:
1336:
680:
XYZ - A customized assembly of single stages, including moving
408:
1181:"Rockwell Automation buys Anorad, sees linear motor expansion"
720:
Custom - Custom configurations of HPPS may be required in the
209:
18:
1312:"New video illustrates breakthrough in lab automation design"
1149:"Linear motors: The future of high-performance machine tools"
624:
operation, filtration of incoming air and protective seals.
352:
The original HPPS were developed at Anorad
Corporation (now
836:
using insulation and cooling, using analysis tools such as
1032:
for process sequence control, provided by many suppliers.
534:
of position measurement and motion (um, urad) as well as
312:
and many more. At their highest performance HPPS may use
969:
Accessories - Hard stops, stiffening brackets, bellows,
862:- Estimating required filters and tuning parameters for
567:(hrs, cycles) often associated with a requirement for a
849:- Estimating flow rates and supply pressures for fluid
1201:. FRACTOVIA MARKET TRENDING NEWS. December 23, 2020.
1082:- Commonly provided with motion controller which has
923:
base for high smoothness of motion, higher precision.
185:
attenuation. Unlike articulating robots, which have
1295:"High-end measuring machine for maximum precision"
1055:Angular accuracy, repeatability, runout, wobble -
866:loops of system axes using analysis tools such as
1068:Inertia, stiffness - scales, dial indicators and
468:is used for cutting thick hard metals such as in
412:High Performance Positioning System - Gantry Type
356:) in the 1980s, after the invention of brushless
149:of the system. High natural frequency allows the
1403:"Programmable Logic Controllers (PLC) Suppliers"
1388:. mcma motion control & motor association.
832:- Predicting thermal expansions and optimizing
781:, settling times, using analysis tools such as
569:Failure modes, effects, and diagnostic analysis
316:base for thermal stability and flat surfaces,
1373:484 Linear Slides and Linear Stages suppliers
8:
1369:"Linear Slides and Linear Stages Suppliers"
1203:CAGR of 4.4%% ...USD 1508.1 million by 2025
590:Thermal - Indicates the highest and lowest
244:. Unsourced material may be challenged and
105:) that is capable of moving an object in a
53:. Unsourced material may be challenged and
688:. Axes may be separated to reduce inertia.
87:high performance positioning system (HPPS)
1488:. Society of Manufacturing. p. 750.
853:and cooling using analysis tools such as
264:Learn how and when to remove this message
73:Learn how and when to remove this message
1167:"In memory of a great technology leader"
1235:. Universal Instruments. Archived from
1102:
610:and Vibration - Indicates the level of
1441:"Frequency Response Function Analyzer"
1147:Czajkowski, Stephen (September 1996).
945:for long travel, sub-micron precision.
169:rattling, HPPS may employ structural
7:
1457:Kensler, Jennifer (March 21, 2014).
242:adding citations to reliable sources
165:, motor cogging, bearing jitter and
51:adding citations to reliable sources
1464:. STAT T&E COE-Report-09-2013.
1351:"Designing machines for cleanrooms"
1110:BROWN, STUART (November 25, 1996).
113:. Position is typically defined in
1112:"The Fast New World of FLATMOTORS"
941:with index mark for homing. Laser
505:specification (technical standard)
14:
530:Precision - Indicates linear and
1314:. HEIDENHAIN. February 5, 2019.
1199:"Linear Motors Market Size 2025"
1165:Eidelberg, Boaz (October 2020).
948:forcer - Forcer options include
437:semiconductor fabrication plants
214:
117:, including linear, in an x,y,z
23:
604:. May require protective seals.
376:and High Velocity Machine Tool
285:process equipment, electronics
97:equipment (e.g. an assembly of
1371:. GlobalSpec Engineering 360.
466:electrical discharge machining
1:
1528:Electromechanical engineering
1026:Programmable logic controller
883:using analysis tools such as
717:, analogous to linear motors.
360:by Anorad's Founder and CEO,
295:coordinate-measuring machines
16:Industrial Engineering method
1028:(PLC) - Higher layer in the
855:Computational fluid dynamics
705:Rotary (pitch, yaw, roll) -
629:Electromagnetic interference
477:Coordinate-measuring machine
153:to drive the system at high
1030:hierarchical control system
1018:- Options include computer
931:brushless DC electric motor
542:for each degree of freedom.
119:cartesian coordinate system
1549:
1482:Slocum, Alexander (1992).
1407:GlobalSpec Engineering 360
997:, temperature sensors and
881:mean time between failures
565:Mean time between failures
1090:Mean time between failure
722:mathematical optimization
484:High-throughput screening
435:manufacturing process in
289:, numerically controlled
93:consisting of a piece of
1485:Precision Machine Design
977:fans, limits, flexures,
444:Surface-mount technology
1513:Positioning instruments
1386:"Motion Control Online"
987:Artificial Intelligence
985:camera and sensors for
877:Reliability engineering
709:may be customized with
536:total indicator reading
324:free motion, brushless
303:pick-and-place machines
107:three-dimensional space
1443:. ACS Motion Control.
1263:. Leica Microsystems.
800:Accuracy and precision
773:analysis - Estimating
715:direct-drive mechanism
640:
540:accuracy and precision
452:printed circuit boards
413:
202:
115:six degrees of freedom
1331:Download MIL-STD-810H
993:, monitoring such as
817:Finite element method
813:Strength of materials
638:
488:laboratory automation
464:Machine Tools - Wire
411:
200:
1424:"XL-80 laser system"
1355:Cleanroom Technology
1119:FORTUNE (Cover Page)
956:for long travel and
879:- Estimating system
742:Dynamics (mechanics)
238:improve this section
47:improve this section
1533:Systems engineering
1185:Control Engineering
939:Incremental encoder
929:- Typically linear
737:and analysis tools
575:Mean time to repair
486:process is used in
470:Die (manufacturing)
433:wafer (electronics)
417:System requirements
354:Rockwell Automation
171:composite materials
1357:. October 6, 2004.
1187:. October 1, 1998.
1084:frequency response
979:robot end effector
693:Robot end effector
641:
573:Maintainability -
532:angular resolution
459:Stereo microscopes
448:integrated circuit
414:
203:
91:positioning system
1076:Natural frequency
1020:numerical control
830:Thermal expansion
775:natural frequency
608:Shock (mechanics)
525:degree of freedom
482:Lab Automation -
427:Semiconductors -
366:Applied Materials
330:articulated robot
274:
273:
266:
151:motion controller
147:natural frequency
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1127:
1121:. Archived from
1116:
1107:
991:Machine learning
952:for high force,
895:Component sizing
682:cable management
429:Photolithography
390:chemical milling
344:and many more.
269:
262:
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255:
249:
218:
210:
192:cartesian robots
179:isolation mounts
95:electromechanics
78:
71:
67:
64:
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27:
19:
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1523:Electric motors
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1476:Further reading
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1128:on June 5, 2020
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1099:
1080:servo bandwidth
1039:
954:rack and pinion
897:
889:Microsoft Excel
808:Microsoft Excel
795:Microsoft Excel
779:servo bandwidth
766:Microsoft Excel
735:system modeling
731:
729:System analysis
651:
646:
644:System solution
612:floor vibration
587:
501:
424:
419:
350:
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259:
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187:revolute joints
159:floor vibration
155:servo bandwidth
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1339:. 31 Jan 2019.
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1037:System testing
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1016:PID controller
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995:accelerometers
983:machine vision
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943:interferometry
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864:PID controller
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847:Fluid dynamics
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819:tools such as
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700:transfer lines
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563:Reliability -
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492:drug discovery
480:
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442:Electronics -
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403:transfer lines
394:aircraft wings
362:Anwar Chitayat
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307:drug discovery
287:assembly lines
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163:acoustic noise
121:, and angular
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744:- Optimizing
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167:cable carrier
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89:is a type of
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32:This section
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1241:. Retrieved
1237:the original
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1130:. Retrieved
1123:the original
1118:
1105:
1040:
971:shock mounts
898:
732:
711:linear stage
667:linear motor
665:, driven by
663:linear stage
652:
627:Radiation -
502:
422:Applications
351:
338:paint robots
318:air bearings
275:
260:
251:
236:Please help
224:
144:
132:deceleration
128:acceleration
86:
84:
69:
60:
45:Please help
33:
1169:. LinkedIn.
1132:December 9,
1070:force gauge
1005:servo drive
975:air cooling
958:timing belt
927:servo motor
917:air bearing
675:timing belt
618:Cleanliness
592:temperature
585:Environment
396:. In 1997
372:Inspection
342:palletizers
299:3D Printing
206:Performance
123:orientation
1507:Categories
1495:0872634922
1280:. Makino.
1243:2020-12-25
1097:References
999:gyroscopes
981:grippers,
950:ball screw
912:stiffness.
750:rotational
671:ball screw
655:Abbe error
1297:. ZEISS.
851:actuators
771:Vibration
622:cleanroom
555:Stiffness
457:Optics -
450:chips on
225:does not
183:vibration
34:does not
1218:. ASML.
1009:EtherCAT
907:Actuator
872:Simulink
787:Simulink
758:Simulink
598:Humidity
374:Orbotech
310:assaying
254:May 2024
138:and low
136:velocity
63:May 2024
1086:tools.
1014:Motion
966:jitter.
921:granite
885:Mathcad
842:Nastran
838:AutoCAD
825:Nastran
821:AutoCAD
804:Mathcad
791:Mathcad
762:Mathcad
602:IP Code
512:Inertia
503:System
382:Siemens
348:History
314:granite
246:removed
231:sources
175:damping
134:, high
130:, high
55:removed
40:sources
1492:
934:rotor.
868:MATLAB
783:MATLAB
754:MATLAB
546:Jitter
521:Motion
475:CMM -
386:Boeing
322:jitter
278:micron
111:motion
1462:(PDF)
1126:(PDF)
1115:(PDF)
919:with
431:is a
398:FANUC
1490:ISBN
1337:IEST
1134:2020
748:and
490:for
388:for
378:Ford
320:for
229:any
227:cite
181:for
177:and
173:for
101:and
38:any
36:cite
673:or
538:of
392:of
370:PCB
240:by
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