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two-axis stage with which many people are familiar is a microscope stage, used to position a slide under a lens. A "three-axis" or "X-Y-Z" stage is composed of three linear stages mounted to each other (often with the use of an additional angle bracket) such that the axes of motion of all stages are orthogonal. Some two-axis and three-axis stages are integrated designs rather than being assembled from separate single-axis stages. Some multiple-axis stages also include rotary or tilt elements such as
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In other automated stages a DC motor may be used in place of a manual control knob. A DC motor does not move in fixed increments. Therefore an alternate means is required to determine stage position. A scale may be attached to the internals of the stage and an encoder used to measure the position of
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may be used in place of, or in addition to a manual knob. A stepper motor moves in fixed increments called steps. In this sense it behaves very much like an indexed knob. If the lead screw pitch is 0.5 mm and the stepper motor has 200 steps per revolution (as is common), then each revolution of
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which presses on a hardened metal pad on the stage platform. Rotating the screw or micrometer pushes the platform forward. A spring provides restoring force to keep the platform in contact with the actuator. This provides more precise motion of the stage. Stages designed to be mounted vertically use
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In three-dimensional space, an object may either rotate about, or translate along any of three axes. Thus the object is said to have six degrees of freedom (3 rotational and 3 translational). A linear stage exhibits only one degree of freedom (translation along one axis). In other words, linear
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Linear stages consist of a platform that moves relative to a base. The platform and base are joined by some form of guide which restricts motion of the platform to only one dimension. A variety of different styles of guides are used, each with benefits and drawbacks making each guide type more
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For position control in more than one direction, multiple linear stages may be used together. A "two-axis" or "X-Y" stage can be assembled from two linear stages, one mounted to the platform of the other such that the axis of motion of the second stage is perpendicular to that of the first. A
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In manual linear stages, a control knob attached to a lead screw is typically used. The knob may be indexed to indicate its angular position. The linear displacement of the stage is related to the angular displacement of the knob by the lead screw pitch. For example if the lead screw pitch is
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0.5 mm then one full revolution of the knob will move the stage platform 0.5 mm relative to the stage base. If the knob has 50 index marks around its circumference, then each index division is equivalent to 0.01 mm of linear motion of the stage platform.
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a slightly different arrangement, where the actuator is attached to the movable platform and its tip rests on a metal pad on the fixed base. This allows the weight of the platform and its load to be supported by the actuator rather than the spring.
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of some form, whether manual, motorized, or hydraulic/pneumatic. The most common method is to incorporate a lead screw passing through a lead nut in the platform. The rotation of such a lead screw may be controlled either manually or by a motor.
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the stage relative to the scale and report this to the motor controller, allowing a motion controller to reliably and repeatably move the stage to set positions.
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stages operate by physically restricting 3 axes of rotation and 2 axes of translation thus allowing for motion on only one translational axis.
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the motor will result in 0.5 mm of linear motion of the stage platform, and each step will result in 0.0025 mm of linear motion.
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High positioning force required, susceptible to binding if bending moments are present, high backlash.
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is often used interchangeably with "linear stage", though technically "linear slide" refers to a
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Low load capacity, quick to wear, oscillating positioning load as bearings recirculate.
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Short travel (limited by flexure range), low load capacity, expensive.
551:"Linear Stage Brings Speed and Precision to Semiconductor Inspection"
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of the purposes of wafer mapping dielectric, characterization, and
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Highest load capacity, unlimited travel, long lifetime, inexpensive.
94:. Statements consisting only of original research should be removed.
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do not use a lead screw, but instead use a fine-pitch screw or a
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used to restrict an object to a single axis of motion. The term
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monitoring where positioning speed and precision are critical.
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Excellent accuracy, no backlash, no wear (infinite lifetime).
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Susceptible to binding if bending moments are present.
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Machine shop equipment (ex. mill and lathe tables).
288:appropriate for some applications than for others.
152:. Unsourced material may be challenged and removed.
374:High load capacity, unlimited travel, inexpensive.
306:low load capacity, poor accuracy, short lifetime.
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53:Learn how and when to remove these messages
506:process for precise linear positioning of
325:Unlimited travel, relatively inexpensive.
230:Learn how and when to remove this message
212:Learn how and when to remove this message
110:Learn how and when to remove this message
437:Precision stages such as those used for
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532:Ultra Precision Machining Linear Stage
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487:high performance positioning systems
386:Radial arm saws, scanners, printers.
150:adding citations to reliable sources
472:Multiple axis stage configurations
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504:semiconductor devices fabrication
312:Optics lab stages, drawer slides.
34:This article has multiple issues.
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16:A tool for precise linear motion
137:needs additional citations for
42:or discuss these issues on the
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529:Nano Positioning Linear Stage
246:Zaber motorized linear stage.
258:is a component of a precise
498:Semiconductor manufacturing
454:In some automated stages a
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502:Linear stages are used in
317:Recirculating ball bearing
416:Position control methods
600:Positioning instruments
483:positioning goniometers
361:Optic fiber alignment.
274:Principle of operation
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463:DC motor with encoder
268:linear motion bearing
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146:improve this article
605:Systems engineering
579:has generic name (
555:www.techbriefs.com
549:Group, SAE Media.
366:Cylindrical sleeve
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558:. Retrieved
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408:Applications
383:Applications
358:Applications
334:Applications
309:Applications
300:Inexpensive.
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36:Please help
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577:|last=
493:Application
283:Guide types
594:Categories
560:2022-05-27
537:References
518:Variations
443:micrometer
172:newspapers
84:improve it
39:improve it
402:Drawbacks
377:Drawbacks
352:Drawbacks
328:Drawbacks
303:Drawbacks
202:June 2022
100:July 2008
88:verifying
45:talk page
569:cite web
396:Benefits
391:Dovetail
371:Benefits
346:Benefits
322:Benefits
297:Benefits
341:Flexure
292:Rollers
186:scholar
82:Please
508:wafers
439:optics
429:Manual
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193:JSTOR
179:books
581:help
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