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367:-based optical profilometers scan surfaces with optical probes which send light interference signals back to the profilometer detector via an optical fiber. Fiber-based probes can be physically located hundreds of meters away from the detector enclosure, without signal degradation. The additional advantages of using fiber-based optical profilometers are flexibility, long profile acquisition, ruggedness, and ease of incorporating into industrial processes. With the small diameter of certain probes, surfaces can be scanned even inside hard-to-reach spaces, such as narrow crevices or small-diameter tubes.
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electronics. For doing large steps, a 3D scan on an optical profiler can be much slower than a 2D scan on a stylus profiler. Optical profilometers do not touch the surface and therefore cannot be damaged by surface wear or careless operators. Many non-contact profilometers are solid-state which tends to reduce the required maintenance significantly. The spot size, or lateral resolution, of optical methods ranges from a few micrometres down to sub micrometre.
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measure small vertical features ranging in height from 10 nanometres to 1 millimetre. The height position of the diamond stylus generates an analog signal which is converted into a digital signal, stored, analyzed, and displayed. The radius of diamond stylus ranges from 20 nanometres to 50 Ξm, and the horizontal resolution is controlled by the scan speed and data signal sampling rate. The stylus tracking force can range from less than 1 to 50 milligrams.
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required. Contacting the surface is often an advantage in dirty environments where non-contact methods can end up measuring surface contaminants instead of the surface itself. Because the stylus is in contact with the surface, this method is not sensitive to surface reflectance or color. The stylus tip radius can be as small as 20 nanometres, significantly better than white-light optical profiling. Vertical resolution is typically sub-nanometer as well.
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vertical measurement has an intrinsic vertical calibration based on laser source wavelength. Samples are not static and there is response of the specimen topography to external stimulus. With on-flight measurement the topography of a moving sample is acquired with short exposure time. MEMS vibrations
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Advantages of contact profilometers include acceptance, surface independence, resolution, it is a direct technique with no modeling required. Most of the world's surface finish standards are written for contact profilometers. To follow the prescribed methodology, this type of profilometer is often
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enable 3D topography measurement in real-time. 3D topography is measured from a single camera acquisition as a consequence the acquisition rate is only limited by the camera acquisition rate, some systems measure topography at a frame rate of 1000 fps. Time-resolved systems enable measurement of
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A diamond stylus is moved vertically in contact with a sample and then moved laterally across the sample for a specified distance and specified contact force. A profilometer can measure small surface variations in vertical stylus displacement as a function of position. A typical profilometer can
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The advantage of time-resolved profilometers is that they are robust against vibrations. Unlike scanning methods, time-resolved profilometer acquisition time is in the milliseconds range. There is no need of vertical calibration: vertical measurement does not depend on a scanning mechanism,
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Advantages of optical profilometers are speed, reliability and spot size. For small steps and requirements to do 3D scanning, because the non-contact profilometer does not touch the surface the scan speeds are dictated by the light reflected from the surface and the speed of the acquisition
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Non-scanning technologies measure the surface topography within a single camera acquisition, XYZ scanning is no longer needed. As a consequence, dynamic changes of topography are measured in real-time. Contemporary profilometers are not only measuring static topography, but now also dynamic
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temperatures, or in radioactive chambers, while the detector is located at a distance, in a human-safe environment. Fiber-based probes are easily installed in-process, such as above moving webs or mounted onto a variety of positioning systems.
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W J Walecki, F Szondy, and M M Hilali, "Fast in-line surface topography metrology enabling stress calculation for solar cell manufacturing for throughput in excess of 2000 wafers per hour" 2008 Meas. Sci. Technol. 19 025302 (6pp)
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An optical profilometer is a non-contact method for providing much of the same information as a stylus based profilometer. There are many different techniques which are currently being employed, such as laser triangulation
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Because these probes generally acquire one point at a time and at high sample speeds, acquisition of long (continuous) surface profiles is possible. Scanning can take place in hostile environments, including very hot or
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vibrations in the MHz range. The stroboscopic unit provides excitation signal to the MEMS and provides trigger signal to light source and camera.
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Jean M. Bennett, Lars
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or measurement of moving specimens. Time-resolved profilometers can be combined with a stroboscopic unit to measure
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Self-Healing-Polymer from Tosoh
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Contact and pseudo-contact methods include stylus profilometer (mechanical profilometer),
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573:"Low-Coherence Interferometry, an Advanced Technique for Optical Metrology in Industry"
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that measures a surface as the surface is moved relative to the contact profilometer's
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measurement can be accomplished when the system is combined with a stroboscopic unit.
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A furrow profilometer is used for the measurement of the cross-sectional geometry of
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Dufour, M. L.; Lamouche, G.; Detalle, V.; Gauthier, B.; Sammut, P. (April 2005).
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Dufour, Marc; Lamouche, G.; Gauthier, B.; Padioleau, C.; Monchalin, J.P. (2006).
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topography â such systems are described as time-resolved profilometers.
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While the historical notion of a profilometer was a device similar to a
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524:"Inspectionofhard-to-reachindustrialpartsusingsmalldiameterprobes"
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MEMS Ultrasonic-Transducers measured at 8 MHz in stroboscopic mode
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and corrugations, and is important in furrow assessments.
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Insight: Non-Destructive
Testing and Condition Monitoring
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Measuring instrument for surface profile and roughness
60:. Unsourced material may be challenged and removed.
481:Binnig, Gerd; Quate, Calvin F; Gerber, Ch (1986).
628:Journal of Irrigation and Drainage Engineering
232:differential interference contrast microscopy
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148:technological facility in Toulouse, France.
460:(2nd ed.). Penton Press. p. 22.
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298:(used for profiling very small objects),
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640:10.1061/(ASCE)0733-9437(1995)121:1(114)
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242:; pattern projection methods such as
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457:Three-Dimensional Surface Topography
58:adding citations to reliable sources
678:Metalworking measuring instruments
454:Stout, K. J.; Blunt, Liam (2000).
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360:Fiber-based optical profilometers
339:topography changes as healing of
300:coherence scanning interferometry
206:surface profile measuring machine
622:Cahoon, Joel E. (January 1995).
220:vertical scanning interferometry
136:Non-Contact Optical Profilometer
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624:"Defining Furrow Cross Section"
45:needs additional citations for
353:digital holographic microscopy
336:digital holographic microscopy
216:digital holographic microscopy
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443:10.1088/0957-0233/19/2/025302
334:Non-scanning technologies as
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228:phase shifting interferometry
601:10.1784/insi.47.4.216.63149
314:Time-resolved profilometers
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256:pattern reflection methods
224:white light interferometry
144:A contact profilometer at
483:"Atomic force microscope"
285:Non-contact profilometers
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263:atomic force microscopy
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158:measuring instrument
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296:confocal microscopy
240:confocal microscopy
398:Road profilometery
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304:digital holography
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667:Categories
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587:CiteSeerX
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170:roughness
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392:See also
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166:quantify
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