220:
and shrinkage can result more complex behavior like bending, twisting and folding and they can happen with different magnitudes in different directions. Utilization of these phenomena for the design of structured materials can be highly attractive because they allow simple, template-free fabrication of very complex repetitive 2D and 3D patterns. However, they cannot be prepared by using sophisticated fabrication methods like two-photon and interference photolithography as mentioned before. There is an advantage of the self-folding approach, is the possibility of quick, reversible, and reproducible fabrication of 3D hollow objects with controlled chemical properties and morphology of both the exterior and the interior.
164:
effect on the material around the voxel/focal point. By moving the focal point around in three-dimensional space and solidifying the medium at different points, the desired 3D geometry can be additively manufactured with feature size down to 100-160 nm as of 2023. The limits of 2PP fabrication depend on the utilized equipment (servo, mirrors, and laser resolution) and selected lens (laser focusing), as well as the material (UV absorption profile and reactivity). Recently, a list of 2PP printed materials has been actively expanding and includes hard and flexible polymers, glass, soft elastomers, enabling microfabrication of various MEMS and soft microbotics.
199:
for 30 minutes. It is contacted with a photomask using the contact stage. This stage, is leaned against the tilting stage and the resist is exposed to the UV. The dose of 365 nm UV is 500mJ/cm. After the exposure, the resist is post-exposure baked on a 65 °C hot plate for 3 minutes and on a 95 °C plate for 10 minutes. In the end, the resist is developed in the SU-8 for about 10 to 15 minutes at the room temperature with mild agitation and then, rinsed with isopropyl alcohol. Besides that, there can be a lot of other procedures. For example, inclined UV lithography, inclined and rotated UV lithography and lithography using reflected UV.
131:. Microscopic mechanical elements such as micromotors, micropumps, and other microfluidic devices can be produced using direct-write concepts. In addition to additive and subtractive processes, DLW allows for the modification of the properties of a material. Mechanisms that allow for these modifications include sintering, microstereolithography, and multiphoton processes. These use pulsed femtosecond lasers to deliver a precise dosage to induce absorption of energy, leading to an
144:
fixed onto one location and the translation stage moves to fabricate each layer vector by vector. A faster alternate involves using a projection principle in which the image is projected onto the surface of the resin so that the irradiation of a layer is done in one step only. The high-resolution results allow for the fabrication of complex shapes that would otherwise be difficult to produce at such small scales.
95:
components. Layers in processes such as electrochemical fabrication can be as thin as 5 to 10 μm. The creation of microscopic structures is similar to conventional additive manufacturing techniques in that a computer aided design model is sliced into an appropriate number of two-dimensional layers in order to create a toolpath. This toolpath is then followed by a mechanical system to produce the desired geometry.
119:
1284:
22:
203:
microstructures fabricated by the 3D micro fabrication technology can be allied to a lot of microsystems directly. Also, it can be used as the molds for electroplating. As a result, these technology can be applied to a variety of fields like filters, mixers, jets, micro channels, light guide panels of LCD monitor and more.
173:
transistor arrays for displays. Another additive process is laser-induced forward transfer (LIFT), which uses pulsed lasers aimed at a coated substrate to transfer material in the direction of the laser flow. LIFT has been used to produce transfer thermo-electric materials, polymers and has been used to print copper wires.
231:
One factor that limit broad applicability of self-folding polymer films is the manufacturing cost. Actually, polymer can be deposited by spinning and dipping coating at ambient conditions, the fabrication of polymer self-folding films is substantially cheaper than fabrication of inorganic ones, which
219:
Stimuli-responsive hydrogels mimic swelling/shrinking behavior of plant cells and produce macroscopic actuation in response to a small variation of environmental conditions. Mostly, homogenous expansion or contraction in all directions can result a change of conditions. Also, inhomogeneous expansion
198:
is a negative thick photoresist, which used in novel 3D micro fabrication method with inclined/rotated UV lithography. During the process, we coat SU-8 50 on a silicon wafer with a thickness of about 100ųm. Then, soft bake the resist on a 65 °C hot plate for 10 minutes and on a 95 °C plate
143:
Microstereolithography is a common technique based on stereolithography principles. 3D components are fabricated by repeatedly layering photopolymerizable resin and curing under an ultraviolet laser. Earlier systems that employ this technique use a scanning principle in which a focused light beam is
163:
the resin or glass at a specific point. To achieve high photon currents in the range of 10 photons s cm femtosecond lasers with pulse widths of 100 fs are used. In 2PP, two photons meet at the focal point, doubling the laser's excitation energy and curing a voxel of 2PP resin while having a minimum
190:
The basic setup of inclined UV exposure has conventional UV source, a contact stage, and a tilting stage. Plus, we place a photomask and a photoresist coated substrate between the upper and lower plates of the contact stage, and it is fixed by pushing up the lower plate with a screw. Then, we can
181:
Focus on the 3D microstructures now, it have been focused in a lot of microsystems like electronic, mechanical, micro-optical and analysis systems. And when this technology is developing, we found that the traditional and conventional micro machining technologies like surface micromachining, bulk
172:
Additive processes involve the layering of materials in a certain pattern. These include laser chemical vapor deposition (LCVD), which use organic precursors to write patterns on a structure or bulk material. This application can be found in the field of electronics, particularly in the repair of
126:
Laser-based techniques are the most common approach for producing microstructures. Typical techniques involve the use of lasers to add or subtract material from a bulk sample. Recent applications of lasers involve the use of ultrashort pulses of lasers focused to a small area in order to create a
235:
To solve these issues, the future research must be focused on deeper investigation of folding to allow design of complex 3D structures using just 2D shapes. On the other hand, searching a way, which is cheap and fast manufacturing of large quantity of self-folding films can be greatly helpful.
211:
Design of complicated 3D microstructure can be highly challenging task for development of novel materials for optics, biotechnology and micro/nano electronics. 3D materials can be fabricated using a lot of methods like two-photon photolithography, interference lithography and molding. But 3D
94:
Much like their macroscopic analog, microstructures can be produced using rapid prototyping methods. These techniques generally involve the layering of some resin, with each layer being much thinner than that used for conventional processes in order to produce higher resolution microscopic
202:
When the trace of the incident UV with a right angle is on a straight line, so the patterns of a photomask are transcribed to the resist. When talking about inclined UV exposure processes, the UV is refracted and reflected, this makes it possible to fabricate various of 3D structures. The
215:
Nature offers a large number of ideas for the design of novel materials with superior properties. Self-assembly and self-organization being the main principle of structure formation in nature attract significant interest as promising concepts for the design of intelligent materials.
77:
refers to manufacturing techniques that involve the layering of materials to produce a three-dimensional structure at a microscopic scale. These structures are usually on the scale of micrometers and are popular in
690:
102:(SLA), which involves the use of a UV light or laser beam on a surface to create a layer, which are then lowered into a tank so that a new layer can be formed on top. Another commonly used method is
135:
that can result in annealing and surface structuring of a material. The specific changes caused by irradiation depend on parameters such as pulse energy, pulse duration or pulse repetition rate.
232:
are produced by vacuum deposition. In another word, there is no method, which is cheap and large-scale production of self-folding polymer films that substantially limits their application.
106:(FDM), in which a moving head creates a layer by melting the model material (usually a polymer) and extrudes the melted material onto a surface. Other methods such as
873:
1475:
563:
494:
Grant-Jacob, James A.; Mills, Benjamin; Feinaeugle, Matthias; Sones, Collin L.; Oosterhuis, Gerrit; Hoppenbrouwers, Marc B.; Eason, Robert W. (2013-06-01).
1322:
1547:
223:
One experimental application of self-folding materials is pasta that ships flat but folds into the desired shape on contact with boiling water.
1138:
706:
659:
626:
322:
269:
32:
43:
1552:
1227:
866:
1480:
986:
763:
294:
455:"Dynamic spatial pulse shaping via a digital micromirror device for patterned laser-induced forward transfer of solid polymer films"
61:
1098:
820:
212:
structuring using these techniques is very complicated, experimentally. This can limit their upscaling and broad applicability.
1633:
1537:
1378:
1342:
859:
742:
83:
127:
pattern that is layered to create a structure. The use of lasers in such a manner is known as direct laser writing (DLW) or
402:
Srinivasaraghavan
Govindarajan, Rishikesh; Sikulskyi, Stanislav; Ren, Zefu; Stark, Taylor; Kim, Daewon (10 November 2023).
1542:
1315:
1288:
1254:
773:
496:"Micron-scale copper wires printed using femtosecond laser-induced forward transfer with automated donor replenishment"
404:"Characterization of Photocurable IP-PDMS for Soft Micro Systems Fabricated by Two-Photon Polymerization 3D Printing"
1593:
1449:
1259:
1195:
680:
654:
182:
micromachining and GIGA process are not sufficient to fabricate or produce oblique and curved 3D microstructures.
1242:
1202:
825:
726:
619:
107:
103:
1638:
1583:
1308:
1033:
1018:
996:
789:
747:
716:
377:
262:
Three-Dimensional
Microfabrication Using Two-Photon Polymerization: Fundamentals, Technology, and Applications
1368:
1207:
1180:
815:
721:
152:
128:
535:
Han, M.; Lee, W.; Lee, S.K.; Lee, S.S. (2004). "3D microfabrication with inclined/rotated UV lithography".
1527:
1495:
1426:
1217:
1212:
1185:
768:
1431:
1143:
1006:
882:
810:
711:
36:
that states a
Knowledge (XXG) editor's personal feelings or presents an original argument about a topic.
453:
Heath, Daniel J; Feinaeugle, Matthias; Grant-Jacob, James A; Mills, Ben; Eason, Robert W (2015-05-01).
1603:
1190:
1153:
1133:
612:
507:
466:
351:
1532:
1247:
1222:
1093:
1050:
928:
923:
664:
160:
1264:
966:
1065:
961:
943:
830:
649:
454:
435:
318:
290:
265:
99:
580:
Ionov, L. (2013). "3D microfabrication using stimuli-responsive self-folding polymer films".
495:
1598:
1470:
1232:
1148:
1108:
794:
589:
544:
515:
474:
425:
415:
359:
195:
79:
1347:
1331:
1083:
1028:
971:
956:
159:
structures with sub-micrometer resolution. The process uses the focal point of a laser to
511:
470:
430:
403:
355:
1485:
1454:
1403:
1352:
1237:
1103:
1045:
1023:
840:
835:
339:
1627:
1269:
1038:
991:
913:
132:
1557:
1173:
1088:
1001:
593:
1168:
1163:
1055:
933:
918:
908:
685:
635:
156:
118:
1500:
1421:
1373:
1128:
1013:
548:
338:
Hahn, Vincent; Mayer, Frederik; Thiel, Michael; Wegener, Martin (2019-10-01).
363:
1608:
1158:
976:
604:
439:
420:
1490:
1413:
1075:
1060:
981:
520:
479:
110:(SLS) are also used in the additive manufacturing of 3D microstructures.
851:
951:
287:
Fundamentals of Modern
Manufacturing: Materials, Processes, and Systems
1441:
1395:
1578:
1300:
117:
1588:
1304:
855:
608:
15:
33:
personal reflection, personal essay, or argumentative essay
155:, e.g., two-photon polymerization (2PP), can be used to
39:
315:
1571:
1520:
1513:
1463:
1440:
1412:
1394:
1387:
1361:
1121:
1074:
942:
896:
889:
803:
782:
756:
735:
699:
673:
642:
564:"MIT researchers develop a shape-shifting pasta"
1476:Radio-frequency microelectromechanical systems
1316:
867:
620:
8:
191:expose the photoresist to the inclined UV.
1517:
1391:
1323:
1309:
1301:
1283:
893:
874:
860:
852:
627:
613:
605:
1491:Biological microelectromechanical systems
519:
478:
429:
419:
122:Setup of a typical laser microfabrication
62:Learn how and when to remove this message
245:
194:An example of the fabrication process:
75:Three-dimensional (3D) microfabrication
1139:Differential technological development
707:Powder bed and inkjet head 3D printing
660:Continuous liquid interface production
7:
308:
306:
289:(5th ed.). Wiley. p. 846.
255:
253:
251:
249:
177:With inclined/rotated UV lithography
1228:Future-oriented technology analysis
260:Baldacchini, Tommasso, ed. (2016).
1481:Microoptoelectromechanical systems
987:High-temperature superconductivity
764:Electron beam freeform fabrication
14:
537:Sensors and Actuators A: Physical
1282:
1099:Self-reconfiguring modular robot
821:Digital modeling and fabrication
20:
562:Nanos, Janelle (June 5, 2017),
1343:Microelectromechanical systems
992:High-temperature superfluidity
743:Laminated object manufacturing
84:microelectromechanical systems
1:
1255:Technology in science fiction
313:Misawa, Hiroaki, ed. (2006).
774:Laser engineered net shaping
594:10.1080/15583724.2012.751923
378:"Photonic Professional GT2"
1655:
1450:Digital micromirror device
1260:Technology readiness level
1196:Technological unemployment
757:Directed energy deposition
691:EAM of metals and ceramics
681:Fused filament fabrication
655:Computed axial lithography
1338:
1278:
1243:Technological singularity
1203:Technological convergence
1019:Multi-function structures
826:Distributed manufacturing
727:Selective laser sintering
700:Powder bed binding/fusion
643:Resin photopolymerization
549:10.1016/j.sna.2003.10.006
500:Optical Materials Express
459:Optical Materials Express
344:Optics and Photonics News
114:3D laser microfabrication
108:selective laser sintering
104:fused deposition modeling
98:A popular application is
1584:Shallow trench isolation
1034:Molecular nanotechnology
997:Linear acetylenic carbon
790:Construction 3D printing
748:Ultrasonic consolidation
717:Selective heat sintering
636:3D printing technologies
364:10.1364/OPN.30.10.000028
340:"3-D Laser Nanoprinting"
285:Groover, Mikell (2012).
168:Other additive processes
1369:Interdigital transducer
1208:Technological evolution
1181:Exploratory engineering
816:3D printing marketplace
722:Selective laser melting
153:Multiphoton lithography
148:Multiphoton lithography
129:multiphoton lithography
1528:Surface micromachining
1427:Scratch drive actuator
1218:Technology forecasting
1213:Technological paradigm
1186:Proactionary principle
769:Laser metal deposition
207:Self-folding materials
139:Microstereolithography
123:
42:by rewriting it in an
1634:3D printing processes
1144:Disruptive innovation
1007:Metamaterial cloaking
883:Emerging technologies
811:3D printing processes
712:Electron beam melting
421:10.3390/polym15224377
121:
1604:Silicon on insulator
1191:Technological change
1134:Collingridge dilemma
521:10.1364/OME.3.000747
480:10.1364/OME.5.001129
1563:3D microfabrication
1533:Bulk micromachining
1248:Technology scouting
1223:Accelerating change
1094:Powered exoskeleton
1051:Programmable matter
929:Smart manufacturing
924:Molecular assembler
904:3D microfabrication
665:Solid ground curing
512:2013OMExp...3..747G
471:2015OMExp...5.1129H
356:2019OptPN..30...28H
1538:HAR micromachining
1265:Technology roadmap
967:Conductive polymer
674:Material extrusion
124:
44:encyclopedic style
31:is written like a
1621:
1620:
1617:
1616:
1509:
1508:
1298:
1297:
1117:
1116:
1066:Synthetic diamond
962:Artificial muscle
944:Materials science
849:
848:
831:Rapid prototyping
783:Building printing
650:Stereolithography
324:978-3-527-31055-5
271:978-0-323-35321-2
100:stereolithography
90:Rapid prototyping
72:
71:
64:
1646:
1599:Photolithography
1518:
1471:Millipede memory
1432:Thermal actuator
1392:
1362:Basic structures
1325:
1318:
1311:
1302:
1286:
1285:
1233:Horizon scanning
1149:Ephemeralization
1109:Uncrewed vehicle
1029:Carbon nanotubes
894:
876:
869:
862:
853:
795:Contour crafting
736:Sheet lamination
629:
622:
615:
606:
599:
597:
577:
571:
570:
568:The Boston Globe
559:
553:
552:
532:
526:
525:
523:
491:
485:
484:
482:
450:
444:
443:
433:
423:
399:
393:
392:
390:
388:
374:
368:
367:
335:
329:
328:
310:
301:
300:
282:
276:
275:
257:
80:microelectronics
67:
60:
56:
53:
47:
24:
23:
16:
1654:
1653:
1649:
1648:
1647:
1645:
1644:
1643:
1639:Microtechnology
1624:
1623:
1622:
1613:
1567:
1505:
1459:
1436:
1408:
1383:
1357:
1348:Microtechnology
1334:
1332:Microtechnology
1329:
1299:
1294:
1274:
1113:
1070:
972:Femtotechnology
957:Amorphous metal
938:
885:
880:
850:
845:
799:
778:
752:
731:
695:
669:
638:
633:
603:
602:
582:Polymer Reviews
579:
578:
574:
561:
560:
556:
534:
533:
529:
493:
492:
488:
452:
451:
447:
401:
400:
396:
386:
384:
376:
375:
371:
337:
336:
332:
325:
312:
311:
304:
297:
284:
283:
279:
272:
259:
258:
247:
242:
229:
209:
188:
179:
170:
161:photopolymerize
150:
141:
116:
92:
68:
57:
51:
48:
40:help improve it
37:
25:
21:
12:
11:
5:
1652:
1650:
1642:
1641:
1636:
1626:
1625:
1619:
1618:
1615:
1614:
1612:
1611:
1606:
1601:
1596:
1591:
1586:
1581:
1575:
1573:
1569:
1568:
1566:
1565:
1560:
1555:
1550:
1545:
1540:
1535:
1530:
1524:
1522:
1515:
1511:
1510:
1507:
1506:
1504:
1503:
1498:
1493:
1488:
1486:Microphotonics
1483:
1478:
1473:
1467:
1465:
1461:
1460:
1458:
1457:
1455:Optical switch
1452:
1446:
1444:
1438:
1437:
1435:
1434:
1429:
1424:
1418:
1416:
1410:
1409:
1407:
1406:
1404:Microbolometer
1400:
1398:
1389:
1385:
1384:
1382:
1381:
1376:
1371:
1365:
1363:
1359:
1358:
1356:
1355:
1353:Micromachinery
1350:
1345:
1339:
1336:
1335:
1330:
1328:
1327:
1320:
1313:
1305:
1296:
1295:
1293:
1292:
1279:
1276:
1275:
1273:
1272:
1267:
1262:
1257:
1252:
1251:
1250:
1245:
1240:
1235:
1230:
1225:
1215:
1210:
1205:
1200:
1199:
1198:
1188:
1183:
1178:
1177:
1176:
1171:
1166:
1161:
1151:
1146:
1141:
1136:
1131:
1125:
1123:
1119:
1118:
1115:
1114:
1112:
1111:
1106:
1104:Swarm robotics
1101:
1096:
1091:
1086:
1080:
1078:
1072:
1071:
1069:
1068:
1063:
1058:
1053:
1048:
1046:Picotechnology
1043:
1042:
1041:
1036:
1031:
1024:Nanotechnology
1021:
1016:
1011:
1010:
1009:
999:
994:
989:
984:
979:
974:
969:
964:
959:
954:
948:
946:
940:
939:
937:
936:
931:
926:
921:
916:
911:
906:
900:
898:
891:
887:
886:
881:
879:
878:
871:
864:
856:
847:
846:
844:
843:
841:3D bioprinting
838:
836:RepRap project
833:
828:
823:
818:
813:
807:
805:
804:Related topics
801:
800:
798:
797:
792:
786:
784:
780:
779:
777:
776:
771:
766:
760:
758:
754:
753:
751:
750:
745:
739:
737:
733:
732:
730:
729:
724:
719:
714:
709:
703:
701:
697:
696:
694:
693:
688:
683:
677:
675:
671:
670:
668:
667:
662:
657:
652:
646:
644:
640:
639:
634:
632:
631:
624:
617:
609:
601:
600:
572:
554:
527:
506:(6): 747–754.
486:
445:
394:
369:
330:
323:
302:
296:978-1118231463
295:
277:
270:
244:
243:
241:
238:
228:
225:
208:
205:
187:
184:
178:
175:
169:
166:
149:
146:
140:
137:
115:
112:
91:
88:
70:
69:
28:
26:
19:
13:
10:
9:
6:
4:
3:
2:
1651:
1640:
1637:
1635:
1632:
1631:
1629:
1610:
1607:
1605:
1602:
1600:
1597:
1595:
1592:
1590:
1587:
1585:
1582:
1580:
1577:
1576:
1574:
1570:
1564:
1561:
1559:
1556:
1554:
1551:
1549:
1546:
1544:
1541:
1539:
1536:
1534:
1531:
1529:
1526:
1525:
1523:
1519:
1516:
1512:
1502:
1499:
1497:
1496:Microfluidics
1494:
1492:
1489:
1487:
1484:
1482:
1479:
1477:
1474:
1472:
1469:
1468:
1466:
1462:
1456:
1453:
1451:
1448:
1447:
1445:
1443:
1439:
1433:
1430:
1428:
1425:
1423:
1420:
1419:
1417:
1415:
1411:
1405:
1402:
1401:
1399:
1397:
1393:
1390:
1386:
1380:
1377:
1375:
1372:
1370:
1367:
1366:
1364:
1360:
1354:
1351:
1349:
1346:
1344:
1341:
1340:
1337:
1333:
1326:
1321:
1319:
1314:
1312:
1307:
1306:
1303:
1291:
1290:
1281:
1280:
1277:
1271:
1270:Transhumanism
1268:
1266:
1263:
1261:
1258:
1256:
1253:
1249:
1246:
1244:
1241:
1239:
1236:
1234:
1231:
1229:
1226:
1224:
1221:
1220:
1219:
1216:
1214:
1211:
1209:
1206:
1204:
1201:
1197:
1194:
1193:
1192:
1189:
1187:
1184:
1182:
1179:
1175:
1172:
1170:
1167:
1165:
1162:
1160:
1157:
1156:
1155:
1152:
1150:
1147:
1145:
1142:
1140:
1137:
1135:
1132:
1130:
1127:
1126:
1124:
1120:
1110:
1107:
1105:
1102:
1100:
1097:
1095:
1092:
1090:
1087:
1085:
1082:
1081:
1079:
1077:
1073:
1067:
1064:
1062:
1059:
1057:
1054:
1052:
1049:
1047:
1044:
1040:
1039:Nanomaterials
1037:
1035:
1032:
1030:
1027:
1026:
1025:
1022:
1020:
1017:
1015:
1012:
1008:
1005:
1004:
1003:
1002:Metamaterials
1000:
998:
995:
993:
990:
988:
985:
983:
980:
978:
975:
973:
970:
968:
965:
963:
960:
958:
955:
953:
950:
949:
947:
945:
941:
935:
932:
930:
927:
925:
922:
920:
917:
915:
914:3D publishing
912:
910:
907:
905:
902:
901:
899:
897:Manufacturing
895:
892:
888:
884:
877:
872:
870:
865:
863:
858:
857:
854:
842:
839:
837:
834:
832:
829:
827:
824:
822:
819:
817:
814:
812:
809:
808:
806:
802:
796:
793:
791:
788:
787:
785:
781:
775:
772:
770:
767:
765:
762:
761:
759:
755:
749:
746:
744:
741:
740:
738:
734:
728:
725:
723:
720:
718:
715:
713:
710:
708:
705:
704:
702:
698:
692:
689:
687:
684:
682:
679:
678:
676:
672:
666:
663:
661:
658:
656:
653:
651:
648:
647:
645:
641:
637:
630:
625:
623:
618:
616:
611:
610:
607:
595:
591:
588:(1): 92–107.
587:
583:
576:
573:
569:
565:
558:
555:
550:
546:
542:
538:
531:
528:
522:
517:
513:
509:
505:
501:
497:
490:
487:
481:
476:
472:
468:
464:
460:
456:
449:
446:
441:
437:
432:
427:
422:
417:
413:
409:
405:
398:
395:
383:
379:
373:
370:
365:
361:
357:
353:
349:
345:
341:
334:
331:
326:
320:
316:
309:
307:
303:
298:
292:
288:
281:
278:
273:
267:
263:
256:
254:
252:
250:
246:
239:
237:
233:
226:
224:
221:
217:
213:
206:
204:
200:
197:
192:
185:
183:
176:
174:
167:
165:
162:
158:
154:
147:
145:
138:
136:
134:
133:excited state
130:
120:
113:
111:
109:
105:
101:
96:
89:
87:
85:
81:
76:
66:
63:
55:
45:
41:
35:
34:
29:This article
27:
18:
17:
1562:
1558:Wire bonding
1388:Applications
1379:Microchannel
1287:
1174:Robot ethics
1089:Nanorobotics
1056:Quantum dots
903:
585:
581:
575:
567:
557:
543:(1): 14–20.
540:
536:
530:
503:
499:
489:
462:
458:
448:
414:(22): 4377.
411:
407:
397:
385:. Retrieved
381:
372:
347:
343:
333:
314:
286:
280:
264:. Elsevier.
261:
234:
230:
222:
218:
214:
210:
201:
193:
189:
180:
171:
151:
142:
125:
97:
93:
74:
73:
58:
49:
30:
1548:Lithography
1238:Moore's law
1169:Neuroethics
1164:Cyberethics
934:Utility fog
919:Claytronics
909:3D printing
686:Robocasting
465:(5): 1129.
387:25 November
186:Fabrication
1628:Categories
1543:Deposition
1501:Micropower
1422:Comb drive
1374:Cantilever
1129:Automation
1014:Metal foam
382:Nanoscribe
350:(10): 28.
240:References
52:March 2020
1609:Smart cut
1514:Processes
1414:Actuators
1159:Bioethics
977:Fullerene
317:. Wiley.
1594:Lift-off
1572:Specific
1442:Switches
1084:Domotics
1076:Robotics
1061:Silicene
982:Graphene
440:38006101
431:10675433
408:Polymers
157:3D print
1553:Etching
1521:General
1396:Sensors
952:Aerogel
508:Bibcode
467:Bibcode
352:Bibcode
227:Outlook
38:Please
1154:Ethics
1122:Topics
890:Fields
438:
428:
321:
293:
268:
1579:LOCOS
1464:Other
1589:LIGA
1289:List
436:PMID
389:2023
319:ISBN
291:ISBN
266:ISBN
196:SU-8
82:and
590:doi
545:doi
541:111
516:doi
475:doi
426:PMC
416:doi
360:doi
1630::
586:53
584:.
566:,
539:.
514:.
502:.
498:.
473:.
461:.
457:.
434:.
424:.
412:15
410:.
406:.
380:.
358:.
348:30
346:.
342:.
305:^
248:^
86:.
1324:e
1317:t
1310:v
875:e
868:t
861:v
628:e
621:t
614:v
598:}
596:.
592::
551:.
547::
524:.
518::
510::
504:3
483:.
477::
469::
463:5
442:.
418::
391:.
366:.
362::
354::
327:.
299:.
274:.
65:)
59:(
54:)
50:(
46:.
Text is available under the Creative Commons Attribution-ShareAlike License. Additional terms may apply.