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Technology plant of ZEISS in
Oberkochen started the same year, and was completed in 2006. In 2010, the semiconductor area achieved revenues of over a billion euros for the first time. Effective October 2014, the subsidiaries Carl Zeiss Laser Optics and Carl Zeiss SMS GmbH were merged into Carl Zeiss SMT GmbH.
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With the further development of the EUV lithography process to High-NA-EUV lithography, Carl Zeiss SMT will soon also enable the semiconductor industry to realize the next generation of microchips: High-NA-EUV lithography enables light from a larger angular range to be used for imaging, allowing up
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entered into a strategic partnership. The
Semiconductor Manufacturing Technology business group was established by ZEISS in 1994. Carl Zeiss SMT GmbH and its subsidiaries Carl Zeiss Laser Optics GmbH and Carl Zeiss SMS GmbH followed in 2001. The construction of the Semiconductor Manufacturing
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The ZEISS business group develops and produces optics for semiconductor production. Its core business is lithography optics that forms the centerpiece of a wafer scanner. The development and manufacture of projection optics and the development of illumination systems take place at the
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This product unit develops and manufactures process control solutions to obtain and analyze relevant information (such as microchip volumes) for logic and memory chip production. This enables the semiconductor industry to meet its challenges for the next generation of elements.
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and measure and optimize defined mask properties. The photomask contains all the structure information that will be imaged on the
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supplied the optics for a circuit printer for the first time. About nine years later, the world's first predecessor to a modern
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Handbook of
Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
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Carl Zeiss is a top supplier of critical subsystems, in: WaferNEWS, July 7/2003, pp. 4
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Hennings, K. (1967). "Technologische
Probleme der Mikrominiaturisierung (Planartechnik)".
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This area develops and manufactures systems that analyze and repair defects on
307:"ZEISS and ASML Strengthen Partnership for Next Generation of EUV Lithography"
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site, while the production of most types of illumination system is located in
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to three times more structures to be imaged on a microchip.
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Birds of a
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and develops and produces equipment for the manufacture of
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115:/semiconductor-manufacturing-technology
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42:Semiconductor manufacturing technology
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286:"Annual Report 2022/23 ZEISS Group"
228:that are used as light sources for
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211:Semiconductor manufacturing optics
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360:Benschop, Jos; Rupp, Wolfgang.
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349:. SPIE Press. p. 83.
256:Process control solutions
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334:(in German): 2337–2341.
89:3.555 billion (2022/23)
445:Carl Zeiss Foundation
410:. Carl Zeiss SMT GmbH
408:"Facts & Figures"
128:Carl Zeiss SMT GmbH
95:Number of employees
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17:Carl Zeiss SMT GmbH
362:"Partnership ASML"
197:carve-out company
134:business group of
240:Photomask systems
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55:Headquarters
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448:(in German)
462:Categories
414:2014-07-14
378:2014-04-04
316:2021-05-11
292:2024-02-07
265:References
246:photomasks
218:Oberkochen
151:Oberkochen
140:microchips
67:Key people
59:Oberkochen
232:systems.
177:In 1968,
61:, Germany
332:technica
163:Rossdorf
39:Industry
222:Wetzlar
195:Philips
191:Philips
173:History
159:Wetzlar
104:Website
83:Revenue
47:Founded
226:lasers
167:Aachen
111:.zeiss
372:(PDF)
365:(PDF)
250:wafer
189:from
179:ZEISS
136:ZEISS
119:.html
117:/home
199:ASML
155:Jena
113:.com
50:2001
109:www
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