Knowledge (XXG)

Laser-assisted device alteration

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transistors. In the case of NMOS, the transistor will turn on. For PMOS, however, the effect is to lower the transistor threshold voltage. The effect on the PMOS transistor becomes proportionately stronger as the laser power is increased. The effect is to either increase or decrease the speed of the
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at specific device transistors. The laser is typically of a short wavelength variety on the order of 1064 nm. This allows the laser to generate photo carriers in the silicon without resulting in localized heating of the device. The LADA technique is somewhat similar in execution to the Soft
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operating parameters, which may be observed as a change in function of the device. The effect of this change in parameters may be to speed up or slow down the operation of the device. This makes LADA a suitable technique for determining critical timing paths within a semiconductor circuit.
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Defect Localization (SDL) technique, except that SDL uses a longer wavelength laser (1340 nm) in order to induce localized heating rather than generate photo carriers. Both techniques require the device to be scanned with a laser while it is under active stimulation by the tester.
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Setup for a LADA analysis involves connecting the device to a test stimulus. The test parameters for operating voltage and device speed are then adjusted to place the device into a state which borders on a pass–fail or fail–pass transition. It is useful to use a tester
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to select the appropriate operating conditions. The effect of scanning the laser over sensitive regions is to trip the device from a pass into a fail condition, or from a fail into a pass condition.
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or bus noise. It has also found wide use in localizing process defects as the LADA effect easily modulates transistor characteristics in the same path as the process defect.
67:. This photocurrent is a temporary effect and only occurs during the time that the laser is stimulating the target region. The creation of this photocurrent alters the 55:
The device being tested is electrically stimulated and the device output is monitored. This technique is applied to the back side of the
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Rowlette, J; Eiles, T (2003), "Critical Timing Analysis in Microprocessors Using Near-IR Laser Assisted Device Alteration (LADA)",
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LADA is useful for confirming or disproving an existing theory for the cause of failure. It may be used to confirm suspected
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of semiconductor devices. The laser is used to temporarily alter the operating characteristics of transistors on the device.
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Kong, C. H; Castro, E. P (2006), "Application of LADA for Post-Silicon Test Content and Diagnostic Tool Validation",
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regions. The effect of the laser on the active transistor region is to generate a localized
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Proceedings of the 32nd International Symposium for Testing and Failure Analysis
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device, thereby allowing direct access of the laser to the device active
24: 132:, Washington, D.C.: International Test Conference: 264–73, 157:, Materials Park, Ohio: ASM International: 431–7, 130:International Test Conference 2003 Proceedings 8: 43:The LADA technique targets a variable power 111:, state elements in memories and leakage. 107:LADA has been used to analyze failures in 120: 7: 75:The laser has differing effects on 14: 17:Laser-assisted device alteration 1: 201: 185:Semiconductor analysis 31:technique used in the 84:device being tested. 39:Theory of operation 102:transistor leakage 192: 169: 167: 150: 144: 142: 125: 33:failure analysis 200: 199: 195: 194: 193: 191: 190: 189: 175: 174: 173: 172: 165: 152: 151: 147: 140: 127: 126: 122: 117: 98: 45:continuous wave 41: 29:timing analysis 12: 11: 5: 198: 196: 188: 187: 177: 176: 171: 170: 163: 145: 138: 119: 118: 116: 113: 97: 94: 40: 37: 13: 10: 9: 6: 4: 3: 2: 197: 186: 183: 182: 180: 166: 164:0-87170-844-2 160: 156: 149: 146: 141: 139:0-7803-8106-8 135: 131: 124: 121: 114: 112: 110: 105: 103: 95: 93: 91: 85: 82: 78: 73: 70: 66: 62: 58: 57:semiconductor 53: 50: 46: 38: 36: 34: 30: 26: 22: 18: 154: 148: 129: 123: 109:domino logic 106: 99: 96:Applications 86: 74: 65:photocurrent 54: 42: 20: 16: 15: 115:References 90:Shmoo plot 69:transistor 61:diffusion 179:Category 27:-based 23:) is a 161:  136:  49:laser 47:(CW) 25:laser 159:ISBN 134:ISBN 81:PMOS 79:and 77:NMOS 21:LADA 181:: 168:. 143:. 19:(

Index

laser
timing analysis
failure analysis
continuous wave
laser
semiconductor
diffusion
photocurrent
transistor
NMOS
PMOS
Shmoo plot
transistor leakage
domino logic
ISBN
0-7803-8106-8
ISBN
0-87170-844-2
Category
Semiconductor analysis

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