22:
240:
39:
105:
86:
58:
43:
147:
65:
262:
72:
32:
186:
182:
125:-based material processing technology that aims at modifying the chemical and physical properties of a surface.
157:
54:
194:
162:
198:
190:
79:
236:
132:
228:
178:
167:
122:
142:
152:
256:
224:
Plasma
Processing of Materials: Scientific Opportunities and Technological Challenges
137:
21:
232:
222:
15:
46:. Unsourced material may be challenged and removed.
8:
227:. Washington, DC: National Academies Press.
106:Learn how and when to remove this message
213:
128:Plasma processing techniques include:
7:
44:adding citations to reliable sources
221:National Research Council (1991).
14:
20:
31:needs additional citations for
1:
148:Plasma electrolytic oxidation
279:
187:physical vapor deposition
183:chemical vapor deposition
158:Plasma functionalization
195:vacuum plasmaspraying
163:Plasma polymerization
199:reactive ion etching
193:, plasma iondoping,
40:improve this article
177:Related topics are
172:Plasma modification
55:"Plasma processing"
191:sputter deposition
263:Plasma processing
242:978-0-309-04597-1
133:Plasma activation
119:Plasma processing
116:
115:
108:
90:
270:
247:
246:
218:
179:plasma chemistry
168:Corona treatment
111:
104:
100:
97:
91:
89:
48:
24:
16:
278:
277:
273:
272:
271:
269:
268:
267:
253:
252:
251:
250:
243:
220:
219:
215:
210:
204:
189:processes like
176:
143:Plasma cleaning
112:
101:
95:
92:
49:
47:
37:
25:
12:
11:
5:
276:
274:
266:
265:
255:
254:
249:
248:
241:
212:
211:
209:
206:
174:
173:
170:
165:
160:
155:
153:Plasma etching
150:
145:
140:
135:
114:
113:
96:September 2022
28:
26:
19:
13:
10:
9:
6:
4:
3:
2:
275:
264:
261:
260:
258:
244:
238:
234:
233:10.17226/1875
230:
226:
225:
217:
214:
207:
205:
202:
200:
196:
192:
188:
184:
180:
171:
169:
166:
164:
161:
159:
156:
154:
151:
149:
146:
144:
141:
139:
138:Plasma ashing
136:
134:
131:
130:
129:
126:
124:
120:
110:
107:
99:
88:
85:
81:
78:
74:
71:
67:
64:
60:
57: –
56:
52:
51:Find sources:
45:
41:
35:
34:
29:This article
27:
23:
18:
17:
223:
216:
203:
175:
127:
118:
117:
102:
93:
83:
76:
69:
62:
50:
38:Please help
33:verification
30:
208:References
66:newspapers
257:Category
80:scholar
239:
197:, and
185:, and
123:plasma
82:
75:
68:
61:
53:
121:is a
87:JSTOR
73:books
237:ISBN
59:news
229:doi
42:by
259::
235:.
201:.
181:,
245:.
231::
109:)
103:(
98:)
94:(
84:·
77:·
70:·
63:·
36:.
Text is available under the Creative Commons Attribution-ShareAlike License. Additional terms may apply.
